JPS6225123U - - Google Patents
Info
- Publication number
- JPS6225123U JPS6225123U JP11657585U JP11657585U JPS6225123U JP S6225123 U JPS6225123 U JP S6225123U JP 11657585 U JP11657585 U JP 11657585U JP 11657585 U JP11657585 U JP 11657585U JP S6225123 U JPS6225123 U JP S6225123U
- Authority
- JP
- Japan
- Prior art keywords
- moving member
- movable
- linear motor
- fixed part
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
- Machine Tool Units (AREA)
Description
第１図は本考案のテーブル装置の一実施例を示
す斜視図、第２図はその実施例における熱の伝達
経路を示す説明図である。
１……固定部、２……第１の移動部材、３……
第２の移動部材、４……案内部、５……保持器、
６……案内面、７……案内部、８……保持器、９
……案内面、１０……第２のリニアモータのＸ軸
固定子、１１……Ｘ軸可動子、１２……断熱体、
１３……連結板、１４……第１のリニアモータの
Ｙ軸可動子、１５……第１のリニアモータのＹ軸
固定子、１６……断熱体、１７……断熱体、１８
……可動子取付部品。
FIG. 1 is a perspective view showing an embodiment of the table device of the present invention, and FIG. 2 is an explanatory diagram showing a heat transfer path in the embodiment. 1... fixed part, 2... first moving member, 3...
second moving member, 4... guide section, 5... retainer,
6... Guide surface, 7... Guide section, 8... Cage, 9
... Guide surface, 10 ... X-axis stator of second linear motor, 11 ... X-axis mover, 12 ... Heat insulator,
13... Connection plate, 14... Y-axis mover of the first linear motor, 15... Y-axis stator of the first linear motor, 16... Heat insulator, 17... Heat insulator, 18
...Mover attachment parts.
Claims (1)
け、前記第１の移動部材上にテーブルに連結する
第２の移動部材を前記第１の移動部材の運動方向
と直交する方向に直線運動可能に設け、前記固定
部と第１の移動部材との間に、第１の移動部材を
駆動する第１のリニアモータを設け、第１の移動
部材と第２の移動部材との間に、第２の移動部材
を駆動する第２のリニアモータを設けたテーブル
装置において、前記リニアモータの可動子もしく
は固定子と、これに連結する部材との間に断熱体
を設けたことを特徴とするテーブル装置。 A first movable member is provided on the fixed part so as to be linearly movable, and a second movable member connected to the table is mounted on the first movable member and is movable linearly in a direction perpendicular to the direction of movement of the first movable member. A first linear motor for driving the first moving member is provided between the fixed part and the first moving member, and a first linear motor for driving the first moving member is provided between the first moving member and the second moving member. A table device provided with a second linear motor that drives a second moving member, characterized in that a heat insulator is provided between the mover or stator of the linear motor and a member connected thereto. table equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11657585U JPS6225123U (en) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11657585U JPS6225123U (en) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6225123U true JPS6225123U (en) | 1987-02-16 |
Family
ID=31001297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11657585U Pending JPS6225123U (en) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6225123U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01188242A (en) * | 1988-01-22 | 1989-07-27 | Canon Inc | Shift guiding device |
-
1985
- 1985-07-31 JP JP11657585U patent/JPS6225123U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01188242A (en) * | 1988-01-22 | 1989-07-27 | Canon Inc | Shift guiding device |
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