JPS6225141U - - Google Patents
Info
- Publication number
- JPS6225141U JPS6225141U JP11657685U JP11657685U JPS6225141U JP S6225141 U JPS6225141 U JP S6225141U JP 11657685 U JP11657685 U JP 11657685U JP 11657685 U JP11657685 U JP 11657685U JP S6225141 U JPS6225141 U JP S6225141U
- Authority
- JP
- Japan
- Prior art keywords
- movable
- moving member
- fixed part
- table device
- movable member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 3
Landscapes
- Machine Tool Units (AREA)
- Linear Motors (AREA)
Description
第１図は本考案のテーブル装置の一実施例を示
す斜視図、第２図は本考案の装置に用いられる冷
却手段の一実施例を一部断面にて示す斜視図、第
３図は本考案の装置における熱伝達経路を説明す
る平面図である。
１……固定部、２……第１の移動部材、３……
第２の移動部材、４……案内部、５……保持器、
６……案内面、７……案内部、８……保持器、９
……案内面、１０……第２のリニアモータのＸ軸
固定子、１１……Ｘ軸可動子、１２……アーム、
１３……連結板、１４……第１のリニアモータの
Ｙ軸可動子、１５……第１のリニアモータのＹ軸
固定子、１６……支持柱、１７……固定子取付部
品、１８……可動子取付部品、Ｃ……冷却手段。
FIG. 1 is a perspective view showing an embodiment of the table device of the present invention, FIG. 2 is a perspective view partially showing an embodiment of the cooling means used in the device of the present invention, and FIG. 3 is a perspective view of the table device of the present invention. It is a top view explaining the heat transfer path in the device of the invention. 1... fixed part, 2... first moving member, 3...
Second moving member, 4... guide section, 5... retainer,
6... Guide surface, 7... Guide section, 8... Cage, 9
... Guide surface, 10 ... X-axis stator of second linear motor, 11 ... X-axis mover, 12 ... Arm,
13... Connection plate, 14... Y-axis mover of the first linear motor, 15... Y-axis stator of the first linear motor, 16... Support column, 17... Stator attachment parts, 18... ...Mover attachment parts, C...Cooling means.
Claims (1)
け、前記第１の移動部材上にテーブルを構成する
第２の移動部材を前記第１の移動部材の運動方向
と直交する方向に直線運動可能に設け、固定部と
第１の移動部材との間および第１の移動部材と第
２の移動部材との間にそれぞれ第１および第２の
リニアモータを設けたテーブル装置において、前
記リニアモータの可動子もしくは固定子と、これ
に連結する部材との間に冷却手段を設けたことを
特徴とするテーブル装置。 A first movable member is provided on the fixed part so as to be linearly movable, and a second movable member constituting a table on the first movable member is linearly movable in a direction perpendicular to the direction of movement of the first movable member. In the table device, first and second linear motors are provided between the fixed part and the first moving member and between the first moving member and the second moving member, respectively. A table device characterized in that a cooling means is provided between a movable element or a stator and a member connected thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11657685U JPS6225141U (en) | 1985-07-31 | 1985-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11657685U JPS6225141U (en) | 1985-07-31 | 1985-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6225141U true JPS6225141U (en) | 1987-02-16 |
Family
ID=31001299
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11657685U Pending JPS6225141U (en) | 1985-07-31 | 1985-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6225141U (en) |
-
1985
- 1985-07-31 JP JP11657685U patent/JPS6225141U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6225141U (en) | ||
| JPS6225123U (en) | ||
| JPS62168225U (en) | ||
| JPH0388021U (en) | ||
| JPS62144132U (en) | ||
| JPS62146537U (en) | ||
| JPS6278232U (en) | ||
| JPH0411874U (en) | ||
| JPH0299394U (en) | ||
| JPS63146471U (en) | ||
| JPH0432884U (en) | ||
| JPS61195581U (en) | ||
| JPH03110666U (en) | ||
| JPS63172503U (en) | ||
| JPS6071594U (en) | Cover device for sliding parts in industrial robots | |
| JPS61190283U (en) | ||
| JPS62179189U (en) | ||
| JPS60149782U (en) | Dust-proof bellows device for industrial robots | |
| JPS604386U (en) | industrial robot | |
| JPS59151437U (en) | Material drive stage for electron beam exposure equipment, etc. | |
| JPH0237587U (en) | ||
| JPS60117687U (en) | Mover support mechanism of linear stepping motor | |
| JPS62144136U (en) | ||
| JPS5843187U (en) | mobile table | |
| JPH0426688U (en) |