JPS624881U - - Google Patents
Info
- Publication number
- JPS624881U JPS624881U JP9514785U JP9514785U JPS624881U JP S624881 U JPS624881 U JP S624881U JP 9514785 U JP9514785 U JP 9514785U JP 9514785 U JP9514785 U JP 9514785U JP S624881 U JPS624881 U JP S624881U
- Authority
- JP
- Japan
- Prior art keywords
- mover
- vacuum
- mover member
- vertical direction
- balancer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
Description
第１図は本考案による垂直駆動装置の一実施例
を示す概略断面図、第２図は第１図の装置の要部
の拡大横断面図、第３図はバランサの拡大平面図
、第４図は第３図のバランサの側面図、第５〜８
図は従来の種々の真空搬送装置の例を示す概略図
である。
図中、４…固定子部材、５…可動子部材、６…
案内レール、７…滑車、８…バランサ、９…ワイ
ヤ。
FIG. 1 is a schematic sectional view showing an embodiment of the vertical drive device according to the present invention, FIG. 2 is an enlarged cross-sectional view of the main parts of the device shown in FIG. 1, FIG. The figure is a side view of the balancer in Figure 3, numbers 5 to 8.
The figures are schematic diagrams showing examples of various conventional vacuum transfer devices. In the figure, 4... stator member, 5... mover member, 6...
Guide rail, 7...pulley, 8...balancer, 9...wire.
補正 昭６０．８．７
図面の簡単な説明を次のように補正する。
明細書第９頁第１０行中の「第５〜８図」を「
第５図〜第８図」と補正する。Amendment August 7, 1980 The brief description of the drawing is amended as follows. "Figures 5 to 8" in page 9, line 10 of the specification are replaced with "
5 to 8".
Claims (1)
子部材と、上記可動子部材に対向して配置され、
上記可動子部材を垂直方向に沿つて駆動するため
順次励磁するようにされた複数個の巻線を備えた
固定子部材と、上記可動子部材に連結され、この
可動子部材の重さにほぼ相応する重さをもち、上
記可動子部材の運動軌道の軸線と平行な案内通路
に沿つて案内されるバランサとから成ることを特
徴とするリニアパルスモータを利用した真空中に
おける垂直駆動装置。 a mover member that is movable in a vertical direction in a vacuum; and a mover member disposed opposite to the mover member,
a stator member having a plurality of windings adapted to be sequentially energized to drive the mover member in a vertical direction; A vertical drive device in a vacuum using a linear pulse motor, characterized in that it consists of a balancer of corresponding weight and guided along a guide path parallel to the axis of the movement trajectory of the armature member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9514785U JPS624881U (en) | 1985-06-25 | 1985-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9514785U JPS624881U (en) | 1985-06-25 | 1985-06-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS624881U true JPS624881U (en) | 1987-01-13 |
Family
ID=30959360
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9514785U Pending JPS624881U (en) | 1985-06-25 | 1985-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS624881U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321086A (en) * | 1976-08-10 | 1978-02-27 | Kawasaki Heavy Ind Ltd | Catalyst-packing apparatus |
-
1985
- 1985-06-25 JP JP9514785U patent/JPS624881U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321086A (en) * | 1976-08-10 | 1978-02-27 | Kawasaki Heavy Ind Ltd | Catalyst-packing apparatus |
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