WO2000028652A1

WO2000028652A1 - Ultrasonic motor

Info

Publication number: WO2000028652A1
Application number: PCT/JP1999/000820
Authority: WO
Inventors: Toshiro Higuchi; Minoru Kurosawa
Original assignee: Japan Science And Technology Corporation
Priority date: 1998-11-05
Filing date: 1999-02-24
Publication date: 2000-05-18
Also published as: JP2000152671A

Abstract

An ultrasonic motor comprising a rotor (1), a multiplicity of drive pieces (2) disposed on the outer peripheral surface of the rotor (1) and each having two perpendicularly arranged ultrasonic vibrators (4), a pre-loading means for pressing the drive pieces (2) to the outer peripheral surface of the rotor (1) and ac power sources (10A, 10B) connected to respective one of two ultrasonic vibrators (4) and held in different phases.

Description

Ultrasonic motor technical field.

The present invention relates to an ultrasonic motor, and more particularly, to an ultrasonic motor that generates a large torque by using a plurality of drivers combining two ultrasonic transducers. Background art

Conventionally, as a technology in such a field, for example, various ultrasonic motors using a conventional ultrasonic vibrator (piezoelectric vibrator) have been proposed (Japanese Patent Application Laid-Open No. Hei 5-2-118787). Gazette, JP-A-6-189571, etc.).

However, with the conventional ultrasonic motor described above, it was difficult to produce a large PZT sintered body, and it was therefore difficult to generate a large torque.

Accordingly, an object of the present invention is to provide an ultrasonic motor that can generate a large torque by arranging a plurality of small ultrasonic transducers that are easy to manufacture.

Disclosure of the invention

The present invention, in order to achieve the above object,

[1] In an ultrasonic motor, a rotor, a plurality of rotors arranged on the outer peripheral surface of the rotor, and two ultrasonic transducers arranged orthogonally; And an AC power supply connected to the two ultrasonic transducers and having different phases.

[2] In an ultrasonic motor, a rotor, a plurality of ultrasonic transducers arranged on the inner peripheral surface of the rotor, and two ultrasonic transducers arranged orthogonally; A preload means for pressing against the peripheral surface, and AC power supplies having different phases connected to the two ultrasonic transducers are provided.

[3] In an ultrasonic motor, the rotor and the outer and inner peripheral surfaces of the rotor A driver in which several ultrasonic transducers are arranged at right angles and two ultrasonic transducers are arranged orthogonally; a preload means for pressing the driver against the outer peripheral surface and the inner peripheral surface of the rotor; and a connection to the two ultrasonic transducers. And AC power supplies having different phases.

(4) In the ultrasonic motor according to the above (1), (2) or (3), the driver is a pair of ultrasonic vibrators arranged on each of two wing pieces opened at a predetermined angle. It has a drive source, and a portion where the two blade pieces meet is brought into contact with the outer peripheral surface, the inner peripheral surface, or the inner and outer peripheral surfaces of the rotor.

[5] In the ultrasonic motor according to the above [1], [2] or [3], the ultrasonic vibrator is a piezoelectric vibrator.

[6] In the ultrasonic motor according to the above [1], [2] or [3], the AC signals having different phases are high-frequency AC signals.

[7] In the ultrasonic motor according to the above [1], [2] or [3], the port is an annular rotor.

[8] In the ultrasonic motor according to the above [1], [2] or [3], the rotor is a cylindrical rotor with a cap.

[9] The ultrasonic motor according to the above [1], [2] or [3], wherein the outer peripheral surface, the inner peripheral surface and the inner and outer peripheral surfaces of the rotor have tapered surfaces.

[10] In an ultrasonic motor, a linear movable element, a plurality of linearly arranged movable elements on the outer surface of the linear movable element, and two ultrasonic transducers arranged orthogonally, and the linear movable element And a preload means for pressing against the outer surface of the transducer, and AC power supplies having different phases connected to the two ultrasonic transducers.

[11] In the ultrasonic motor, a linear movable element, a plurality of linearly arranged movable elements on the inner surface of the linear movable element, and two ultrasonic transducers arranged orthogonally; And a preload means for pressing against the inner surface of the transducer, and AC power supplies having different phases connected to the two ultrasonic transducers.

[12] In the ultrasonic motor, a linear movable element, a plurality of linearly movable elements are arranged on the outer surface and the inner surface of the linear movable element, and two ultrasonic transducers are orthogonally arranged. A preload means for pressing against the outer side surface and the inner side surface of the linear movable element; and an AC power supply having different phases connected to the two ultrasonic transducers. It is something that has been done.

[13] In the ultrasonic motor according to the above [10], [11] or [12], the driver is provided with an ultrasonic vibrator on each of two wing pieces opened at a predetermined angle. The linear motor has a pair of drive sources, and a portion where the two wing pieces meet is brought into contact with the outer surface, the inner surface, or the inner and outer surfaces of the linear mover.

[14] In the ultrasonic motor according to the above [10], [11] or [12], the ultrasonic vibrator is a piezoelectric vibrator.

[15] In the ultrasonic motor according to the above [10], [11] or [12], the AC signals having different phases are high-frequency AC signals.

[16] In the ultrasonic motor according to the above [10], [11] or [12], the linear movable element is a frame-shaped movable element.

[17] In the ultrasonic motor according to the above [10], [11] or [12], the linear movable element is a movable element with a cap.

[18] The ultrasonic motor according to [10], [11] or [12], wherein the outer surface, the inner surface, or the inner and outer surfaces of the lower movable element have a tapered surface. is there. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a plan view of an ultrasonic motor showing a first embodiment of the present invention.

FIG. 2 is a side view of an ultrasonic motor showing a first embodiment of the present invention.

FIG. 3 is a partially broken plan view of a driver of the ultrasonic motor according to the first embodiment of the present invention.

FIG. 4 is a configuration diagram showing an arrangement state of one driver of the ultrasonic motor according to the first embodiment of the present invention.

FIG. 5 is a diagram showing a shape of an analysis model of a driver of the ultrasonic motor of the present invention. FIG. 6 is a diagram showing an operation of a driver of the ultrasonic motor of the present invention.

FIG. 7 is a view showing a modified example of the ultrasonic motor according to the first embodiment of the present invention. FIG. 8 is a plan view of an ultrasonic motor according to a second embodiment of the present invention.

FIG. 9 is a plan view of an ultrasonic motor according to a third embodiment of the present invention.

FIG. 10 is a side view of an ultrasonic motor according to a fourth embodiment of the present invention.

FIG. 11 is a side view of an ultrasonic motor according to a fifth embodiment of the present invention.

FIG. 12 is a side view of a sound wave motor according to a sixth embodiment of the present invention.

FIG. 13 is a side view of an ultrasonic motor according to a seventh embodiment of the present invention.

FIG. 14 is a plan view of a linear ultrasonic motor showing an eighth embodiment of the present invention. FIG. 15 is a side view of a linear ultrasonic motor showing an eighth embodiment of the present invention. FIG. 16 is a plan view of a linear ultrasonic motor showing a ninth embodiment of the present invention. FIG. 17 is a side view of a linear ultrasonic motor showing a ninth embodiment of the present invention. the first 8 figures Ru side view der linear type ultrasonic motor of a first 0 embodiment of the present invention _β

FIG. 19 is a side view of a linear ultrasonic motor according to a eleventh embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a plan view of an ultrasonic motor showing a first embodiment of the present invention, FIG. 2 is a side view thereof, FIG. 3 is a partially cutaway plan view of a driver of the ultrasonic motor, and FIG. FIG. 3 is a configuration diagram showing an arrangement state of one driver.

In these figures, 1 is a rotor (rotating body), 1 mm is a mouthpiece, and 2 is a driver. The driver 2 has two metal blades opened at a predetermined angle (for example, 90 degrees). It has a pair of drive sources, each with a piezoelectric vibrator (ultrasonic vibrator) 4 arranged on each piece, and the tip 8 having a force cut portion 7 where these two metal wings are brought into contact with the rotor 1 As described above, a plurality of these components are arranged around the rotor 1 and each of the pair of drive sources is provided. It is connected to AC power supplies 10 A and 1 OB that provide AC signals with different phases, and generates a rotational force in the rotor 1.

That is, a piezoelectric body such as PZT is installed on each of a pair of metal wing pieces opened at 90 degrees, and when an AC signal of 30 kHz with a changed phase is applied to each PZT, it is installed on each wing. The ultrasonic vibration of the PZT propagates through each metal wing, and the ultrasonic vibration is synthesized at the tip 8 where the two metal wings are combined. Then, a preload in the compression direction is applied to the holding portion 9 of the piezoelectric driver 2. That is, as shown in FIG. 3, the two piezoelectric vibrators 4 having the electrodes 5 are clamped by the pressing bolts 6 and the nuts 3 with the holding portion 9 interposed therebetween.

FIG. 4 is an arrangement diagram of one driver 2 obtained in this manner.

In this figure, 11 is a connected body fixed to the holding portion 9, 12 is a spring, 13 is a bushing bolt, 14 is a linear slider, and 15 is a fixed base.

Here, the driver 2 is fixed to the linear slider 14 and has one degree of freedom in the axial direction of the rotor 1. The pressing force of the piezoelectric vibrator 4 against the rotor 1 can be adjusted by the spring 12 and the pressing bolt 6 at the rear of the driver 2.

Next, the driver 2 will be described in detail.

FIG. 5 is a view showing the shape of a breaking model of the driver of the ultrasonic motor of the present invention, and FIG. 6 is a view showing the operation of the driver of the ultrasonic motor.

Also, among the natural vibration modes of the piezoelectric vibrator 4, the mode in which the A and B parts vibrate in-phase and the tip 8 vibrates longitudinally (Fig. 6 (a)) There is a mode [Fig. 6 (b)] in which the tip 8 is laterally vibrated by phase longitudinal vibration.

By matching the two vibration mode resonance frequencies, the two vibration modes degenerate. At the resonance frequency at which the mode degenerates, when a voltage of o-sin ω t (o is a constant) is applied to one piezoelectric vibrator 4 and a voltage of α · c 0 s ω t is applied to the other piezoelectric vibrator 4, The tip 8 moves in an elliptical motion. By pressing the rotor 1 at a right angle to the direction of the longitudinal vibration on the tip end 8 of the driver 2 performing the elliptical motion, the rotor 1 receives the thrust in the transverse vibration direction. The direction of the thrust is determined by the direction of the elliptical movement of the tip 8. The direction of the elliptical motion of the tip 8 can be changed by the phase difference of the voltage applied to the driver 2. Therefore, when the tip 8 of the driver 2 is brought into contact with the rotor 1, the motor generates a forward or reverse rotation force according to the voltage phase. If many of these pairs are arranged on the outer peripheral portion of the rotor 1, a large torque can be generated. That is, although it is difficult to produce a large PZT sintered body and generate a large torque, in the present invention, a small PZT sintered body that is easy to manufacture is infinitely easy to generate a large torque. Now you can.

Also, as an application, a structure that generates a “wedge effect” by providing a tapered surface on the peripheral surface of the rotor and disposing the above-described driver 2 on the tapered surface when the drive source and the rotor are disposed relative to each other. It is also possible to adopt a “rotation-free” rotating structure without bearings.

Furthermore, by arranging a plurality of drivers 2 on the outer periphery of the rotor 1, torque can be combined to increase the torque. At present, the thrust of one of the drivers 2 is 5 ON (50 cmZ seconds). In this case, if three pieces are attached to a rotor with a diameter of 40 cm, the torque becomes 30 Nm.

In this embodiment, the force described in the case where three drivers 2 are arranged on the outer periphery of the rotor, and as shown in FIG. 7, a large number of drivers 2 may be arranged. FIG. 8 is a plan view of an ultrasonic motor according to a second embodiment of the present invention.

In this embodiment, the rotor is an annular rotor 21, and a plurality of (here, three) drivers 2 are arranged to act on the inner peripheral surface of the annular rotor 21.

According to this embodiment, the rotor is an annular rotor 31 and the annular rotor 3 1

The plurality of drivers 2 are arranged so as to act on the outer peripheral surface and inner peripheral surface 1.

According to this embodiment, the rotor is formed as a cylindrical rotor 41 with a cap 41A, and is arranged so that a plurality of drivers 2 act on the outer peripheral surface and the inner peripheral surface thereof.

With such a configuration, the cap 41A can be used as a table.

In this embodiment, a taper surface 51 a is formed on the outer peripheral surface of the rotor 51, By driving the outer surface with the surface 51a with the driver 2, a large preload can be applied only by the weight of the mouth 51 by the wedge effect, and driving without a bearing is possible.

FIG. 12 is a side view of an ultrasonic motor according to a sixth embodiment of the present invention.

According to this embodiment, the rotor is formed into an annular port 61, and the annular rotor 6

Tapered surfaces 6 1 a and 6 1 b are formed on the outer and inner peripheral surfaces of 1, and the tapered surfaces 6 1 a

, 6 1b, the driver 2 is arranged.

As described above, by driving from inside and outside of the annular rotor 61 having the tapered surface, a large torque can be obtained, and the rotor can be held without a bearing.

FIG. 13 is a side view of an ultrasonic motor according to a third embodiment of the present invention.

In this embodiment, the rotor is a cylindrical rotor 71 with a cap 71A, and tapered surfaces 71a, 71b are formed on the outer peripheral surface and the inner peripheral surface thereof. A plurality of drivers 2 are arranged to act on 7 1 b, respectively.

With such a configuration, the cap 71A can be used as a table.

FIG. 14 is a plan view of a linear ultrasonic motor showing an eighth embodiment of the present invention, and FIG. 15 is a side view of the linear ultrasonic motor.

In this embodiment, a plurality of oscillators 2 are arranged on the outer surface 81a of the parallel frame-shaped linear armature 81.

With this configuration, the linear mover 81 can be moved in the linear direction.

FIG. 16 is a plan view of a linear ultrasonic motor according to a ninth embodiment of the present invention, and FIG. 1 is a side view of the linear ultrasonic motor.

In this embodiment, a linear mover 91 having a parallel frame-shaped outer surface 91a and an inner surface 91b with a cap 92 is disposed, and on the outer surface 91a and the inner surface 91b. A plurality of drivers 2 are arranged.

With this configuration, the cap 92 can be used as a table. FIG. 18 is a side view of a linear ultrasonic motor according to a tenth embodiment of the present invention. In this embodiment, a plurality of armatures 2 are arranged on the outer surface of a linear mover 101 having a taper surface 101a.

As described above, by driving from the outer side surface of the linear mover 101 having the taper surface 101a, the rotor can be held without bearings.

FIG. 19 is a side view of a linear ultrasonic motor showing an eleventh embodiment of the present invention. In this embodiment, a plurality of drivers 2 are provided on the inner and outer tapered surfaces 1 lib, 1 1 a of the linear mover 1 1 1 having the inner and outer tapered surfaces 1 lib, 1 1 1 a with the cap 1 12. Deploy.

As described above, a large torque can be obtained by driving from the taper surfaces 1 1 1b and 1 1a on the inner and outer sides of the linear mover 1 11 having the taper surface with the cap 1 12 as described above. As well as holding the rotor without bearings.

In addition, the cap 112 can be used as a table.

In the above embodiment, a piezoelectric body is used as the vibrator, but any other ultrasonic vibrator may be used.

As described above, according to the present invention, the following effects can be obtained.

(A) A large torque can be generated by arranging a plurality of small ultrasonic transducers that are easy to manufacture.

For example, it is possible to perform micro-controlled rotation and linear drive of a huge structure including a huge crane, a huge antenna, a huge telescope, and the like.

Also, by utilizing the fact that the driving section can be made thin, a very thin motor can be obtained.

(B) A larger torque can be generated by applying a plurality of ultrasonic motor drivers to the inner and outer surfaces of the rotor or the linear movable element.

(C) By forming a tapered surface on the rotor or linear mover, and applying a plurality of ultrasonic motor drivers to the tapered surface, a large torque can be obtained and no bearing is used. Can hold the rotor.

(D) By using a rotor or linear mover with a cap, Can be used as a table.

It should be noted that the present invention is not limited to the above embodiments, and various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention. Industrial applicability.

As described above, the ultrasonic motor according to the present invention is suitable for use in micro-controlling and linear driving of a huge structure including a huge crane, a huge antenna, a huge telescope, and the like.

Claims

The scope of the claims

1.

(a) rotor and

(b) a plurality of drivers arranged on the outer peripheral surface of the rotor and having two ultrasonic transducers arranged orthogonally;

(c) preload means for pressing the driver against the outer peripheral surface of the rotor;

(d) An ultrasonic motor, comprising: AC power supplies having different phases connected to the two ultrasonic transducers.

2.

(a) rotor and

(b) a plurality of drivers arranged on the inner peripheral surface of the rotor and having two ultrasonic transducers arranged orthogonally;

(c) preload means for pressing the driver against the inner peripheral surface of the rotor;

3.

(a) rotor and

(b) a plurality of drivers arranged on the outer peripheral surface and the inner peripheral surface of the rotor, and two ultrasonic transducers arranged orthogonally;

(c) a preload means for pressing the driver against the outer peripheral surface and the inner peripheral surface of the rotor; and (d) an AC power supply connected to the two ultrasonic transducers and having different phases. Ultrasonic motor.

4. The ultrasonic motor according to claim 1, 2 or 3, wherein the driver has a pair of drive sources each having an ultrasonic vibrator disposed on each of two wing pieces opened at a predetermined angle. An ultrasonic motor, wherein a portion where two blade pieces meet is brought into contact with an outer peripheral surface, an inner peripheral surface, or an inner and outer peripheral surface of the rotor.

5. The ultrasonic motor according to claim 1, 2 or 3, wherein the ultrasonic vibrator is a piezoelectric vibrator.

6. The ultrasonic motor according to claim 1, 2 or 3, wherein the AC signals having different phases are high-frequency AC signals.

7. The ultrasonic motor according to claim 1, 2 or 3, wherein the rotor is an annular rotor.

8. The ultrasonic motor according to claim 1, 2 or 3, wherein the rotor is a cylindrical rotor with a cap.

9. The ultrasonic motor according to claim 1, 2, or 3, wherein the outer peripheral surface, the inner peripheral surface, and the inner and outer peripheral surfaces of the rotor have tapered surfaces.

Ten.

(a) a linear armature,

(b) a plurality of drivers arranged on the outer surface of the linear movable element and having two ultrasonic transducers arranged orthogonally;

(c) preload means for pressing the driver against the outer surface of the linear mover,

1 1.

(a) a linear armature,

(b) a large number of ultrasonic transducers are arranged on the inner surface of the linear movable element, and two ultrasonic transducers are arranged orthogonally;

(c) preload means for pressing the driver against the inner surface of the linear mover,

1 2.

(a) a linear armature,

(b) a plurality of linear oscillators arranged on an outer surface and an inner surface thereof, and two ultrasonic transducers arranged orthogonally;

(c) preload means for pressing the driver against the outer surface and the inner surface of the linear mover;

(d) an AC power supply having different phases connected to the two ultrasonic vibrators. An ultrasonic motor characterized in that:

13. The ultrasonic motor according to claim 10, wherein the drive element comprises a pair of drive sources each including an ultrasonic vibrator disposed on each of two wing pieces opened at a predetermined angle. A supersonic-wave motor, characterized in that a portion where the two blade pieces meet is brought into contact with an outer surface, an inner surface or an inner and outer surface of the linear movable element.

14. The ultrasonic motor according to claim 10, 11, or 12, wherein the ultrasonic vibrator is a piezoelectric vibrator.

15. The ultrasonic motor according to claim 10, 11, or 12, wherein the AC signals having different phases are high-frequency AC signals.

16. The ultrasonic motor according to claim 10, 11 or 12, wherein the linear movable element is a frame-shaped movable element.

17. The ultrasonic motor according to claim 10, wherein the linear movable element is a movable element with a cap.

18. The ultrasonic motor according to claim 10, 11 or 12, wherein the linear movable element has a tapered surface on an outer surface, an inner surface, or an inner and outer surface.