JPH0226236U - - Google Patents
Info
- Publication number
- JPH0226236U JPH0226236U JP10329088U JP10329088U JPH0226236U JP H0226236 U JPH0226236 U JP H0226236U JP 10329088 U JP10329088 U JP 10329088U JP 10329088 U JP10329088 U JP 10329088U JP H0226236 U JPH0226236 U JP H0226236U
- Authority
- JP
- Japan
- Prior art keywords
- movable
- feed screw
- downward
- moving
- linear guide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Wire Bonding (AREA)
- Die Bonding (AREA)
Description
第１図は本考案の実施例の、分離状態の斜視図
、第２図は組立状態の斜視図である。
１……ガイドブロツク、２……下方移動板、３
……Ｙ方向送りネジ、４……Ｘ方向送りネジ、５
……Ｘ方向移動台、６……上方移動板、７……Ｘ
方向リニアガイド、８……Ｙ方向移動台、９……
Ｙ方向リニアガイド。
FIG. 1 is a perspective view of an embodiment of the present invention in a separated state, and FIG. 2 is a perspective view of an assembled state. 1...Guide block, 2...Downward moving plate, 3
...Y direction feed screw, 4...X direction feed screw, 5
...X direction moving table, 6...Upward moving plate, 7...X
Direction linear guide, 8...Y direction moving table, 9...
Y direction linear guide.
Claims (1)
により送りネジに沿つて往復動する移動部材を介
してボンデイング装置のＸＹテーブルをＸＹ移動
せしめるＸＹテーブルの駆動機構において、前記
移動部材の往復動をガイドするリニアガイドを設
け、前記移動部材を該リニアガイドに座乗して設
けたことを特徴とするＸＹテーブルの駆動機構。 (2) 下方移動板をその下方に設けたＸ方向送り
ネジを介してガイドブロツクに対してＸ方向に移
動可能に支持し、下方移動板の上方には上方移動
板をＹ方向に移動自在に支持し、Ｙ方向送りネジ
によりＹ方向に移動可能とされたＹ方向移動台を
設け、該Ｙ方向移動台と前記上方移動板とをＸ方
向には互いに移動自在に、Ｙ方向には移動不能に
連結したボンデイング装置におけるＸＹテーブル
において、前記下方移動板の下方にＸ方向リニア
ガイドを設け、該Ｘ方向リニアガイドに前記Ｘ方
向送りネジによりＸ方向に移動可能とされたＸ方
向移動台を座乗して設け、該Ｘ方向移動台と前記
下方移動板とを一方に設けた複数個のローラ間に
他方に設けた連結バーを挿入してＸ方向に互いに
移動不能に連結し、前記ガイドブロツクに対して
直交方向にＹ方向リニアガイドを設け、該Ｙ方向
リニアガイドに前記Ｙ方向移動台を座乗して設け
たことを特徴とするボンデイング装置におけるＸ
Ｙテーブル。[Scope of Claim for Utility Model Registration] (1) An XY table that moves the XY table of a bonding device in XY through a moving member that is screwed onto the feed screw and reciprocates along the feed screw by forward and reverse rotation of the feed screw. A drive mechanism for an XY table, characterized in that the drive mechanism includes a linear guide for guiding the reciprocating movement of the moving member, and the moving member is seated on the linear guide. (2) The downward moving plate is supported so as to be movable in the X direction with respect to the guide block via the X direction feed screw provided below, and the upward moving plate is supported above the downward moving plate so as to be movable in the Y direction. A Y-direction moving table is provided which is supported and movable in the Y direction by a Y-direction feed screw, and the Y-direction moving table and the upward moving plate are mutually movable in the X direction but cannot be moved in the Y direction. An X-direction linear guide is provided below the downward moving plate in the XY table of the bonding device connected to the The X-direction movable table and the downward movable plate are provided on one side, and a connecting bar provided on the other side is inserted between a plurality of rollers to connect the X-direction movable table and the downward movable plate to each other in an immovable manner in the X direction. A bonding apparatus characterized in that a Y-direction linear guide is provided in a direction orthogonal to the
Y table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988103290U JPH0729632Y2 (en) | 1988-08-05 | 1988-08-05 | XY table in bonding equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988103290U JPH0729632Y2 (en) | 1988-08-05 | 1988-08-05 | XY table in bonding equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0226236U true JPH0226236U (en) | 1990-02-21 |
| JPH0729632Y2 JPH0729632Y2 (en) | 1995-07-05 |
Family
ID=31333986
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988103290U Expired - Fee Related JPH0729632Y2 (en) | 1988-08-05 | 1988-08-05 | XY table in bonding equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729632Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5952540A (en) * | 1982-09-20 | 1984-03-27 | 株式会社富士電機総合研究所 | Electromagnetic type crushing and mixing apparatus |
| JPS6299038A (en) * | 1985-10-25 | 1987-05-08 | Hitachi Ltd | Stage for positioning |
-
1988
- 1988-08-05 JP JP1988103290U patent/JPH0729632Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5952540A (en) * | 1982-09-20 | 1984-03-27 | 株式会社富士電機総合研究所 | Electromagnetic type crushing and mixing apparatus |
| JPS6299038A (en) * | 1985-10-25 | 1987-05-08 | Hitachi Ltd | Stage for positioning |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0729632Y2 (en) | 1995-07-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |