JPH0184185U - - Google Patents
Info
- Publication number
- JPH0184185U JPH0184185U JP1988147598U JP14759888U JPH0184185U JP H0184185 U JPH0184185 U JP H0184185U JP 1988147598 U JP1988147598 U JP 1988147598U JP 14759888 U JP14759888 U JP 14759888U JP H0184185 U JPH0184185 U JP H0184185U
- Authority
- JP
- Japan
- Prior art keywords
- alarm
- utility
- control device
- model registration
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 4
- 229910000077 silane Inorganic materials 0.000 claims description 4
- 239000000779 smoke Substances 0.000 claims description 3
- 238000002485 combustion reaction Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 6
- 239000007789 gas Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 230000002265 prevention Effects 0.000 claims 1
- 231100000331 toxic Toxicity 0.000 claims 1
- 230000002588 toxic effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
Landscapes
- Fire-Detection Mechanisms (AREA)
- Emergency Alarm Devices (AREA)
- Fire Alarms (AREA)
Description
第１図はこの考案の一実施例の概略図、第２図
はその回路図、第３図は光電式煙感知器とイオン
化式煙感知器との特性曲線図である。
１……シランガスボンベ、３……格納箱、６…
…窒化膜形成装置、８……除害装置、１０……検
出箱、１１……排気ダクト、Ｄ１，Ｄ２……燃焼
生成物を検出する火災感知器。
FIG. 1 is a schematic diagram of an embodiment of this invention, FIG. 2 is a circuit diagram thereof, and FIG. 3 is a characteristic curve diagram of a photoelectric smoke detector and an ionization smoke detector. 1...silane gas cylinder, 3...storage box, 6...
...Nitride film forming device, 8...Abatement device, 10...Detection box, 11...Exhaust duct, D1 , D2 ...Fire detector for detecting combustion products.
Claims (1)
可燃性のシランガスを使用する箇所に、該シラン
ガスが漏洩し空気中の酸素と反応し燃焼すること
により生ずる燃焼生成物を検出する火災感知器を
設け、この感知器の出力変化により警報を発する
とともに消火装置などの防災装置および半導体製
造工程などを制御することを特徴とする半導体工
場などにおける警報および制御装置。 ２ 除害装置の２次側に、出力側にインバータを
備えた火災感知器が設けられた実用新案登録請求
の範囲第１項記載の半導体工場などにおける警報
および制御装置。 ３ 火災感知器がシランガスボンベを収納した格
納箱に設けられた実用新案登録請求の範囲第１項
記載の半導体工場などにおける警報および制御装
置。 ４ 火災感知器が、イオン化式煙感知器である実
用新案登録請求の範囲第１項ないし第３項のいず
れかに記載された半導体工場などにおける警報お
よび制御装置。[Scope of Claim for Utility Model Registration] 1. In areas where toxic and flammable silane gas is used as a processing gas, such as in semiconductor manufacturing processes, the silane gas leaks, reacts with oxygen in the air, and burns, resulting in combustion products. An alarm and control device for a semiconductor factory, etc., which is equipped with a fire detector to detect a fire, and issues an alarm based on a change in the output of the detector, and also controls a disaster prevention device such as a fire extinguisher, a semiconductor manufacturing process, etc. 2. An alarm and control device for a semiconductor factory or the like as set forth in claim 1 of the utility model registration, wherein a fire detector equipped with an inverter on the output side is provided on the secondary side of the abatement device. 3. The alarm and control device in a semiconductor factory or the like as set forth in claim 1 of the utility model registration claim, in which a fire detector is installed in a storage box containing a silane gas cylinder. 4. An alarm and control device for a semiconductor factory or the like as set forth in any one of claims 1 to 3 of the utility model registration claim, wherein the fire detector is an ionization smoke detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988147598U JPH0237103Y2 (en) | 1988-11-14 | 1988-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988147598U JPH0237103Y2 (en) | 1988-11-14 | 1988-11-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0184185U true JPH0184185U (en) | 1989-06-05 |
| JPH0237103Y2 JPH0237103Y2 (en) | 1990-10-08 |
Family
ID=31418150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988147598U Expired JPH0237103Y2 (en) | 1988-11-14 | 1988-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0237103Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023170467A (en) * | 2022-05-19 | 2023-12-01 | 大陽日酸株式会社 | High pressure gas facility monitoring system and high pressure gas facility monitoring method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138797U (en) * | 1974-09-17 | 1976-03-23 | ||
| JPS5721350A (en) * | 1980-05-28 | 1982-02-04 | Naarden International Nv | Perfume composition and use |
-
1988
- 1988-11-14 JP JP1988147598U patent/JPH0237103Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5138797U (en) * | 1974-09-17 | 1976-03-23 | ||
| JPS5721350A (en) * | 1980-05-28 | 1982-02-04 | Naarden International Nv | Perfume composition and use |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2023170467A (en) * | 2022-05-19 | 2023-12-01 | 大陽日酸株式会社 | High pressure gas facility monitoring system and high pressure gas facility monitoring method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0237103Y2 (en) | 1990-10-08 |
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