JPH0183073U - - Google Patents

Info

Publication number
JPH0183073U
JPH0183073U JP1987165222U JP16522287U JPH0183073U JP H0183073 U JPH0183073 U JP H0183073U JP 1987165222 U JP1987165222 U JP 1987165222U JP 16522287 U JP16522287 U JP 16522287U JP H0183073 U JPH0183073 U JP H0183073U
Authority
JP
Japan
Prior art keywords
substrate support
vapor phase
phase growth
growth apparatus
sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987165222U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345957Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16522287U priority Critical patent/JPH0345957Y2/ja
Publication of JPH0183073U publication Critical patent/JPH0183073U/ja
Application granted granted Critical
Publication of JPH0345957Y2 publication Critical patent/JPH0345957Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP16522287U 1987-10-28 1987-10-28 Expired JPH0345957Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16522287U JPH0345957Y2 (en:Method) 1987-10-28 1987-10-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16522287U JPH0345957Y2 (en:Method) 1987-10-28 1987-10-28

Publications (2)

Publication Number Publication Date
JPH0183073U true JPH0183073U (en:Method) 1989-06-02
JPH0345957Y2 JPH0345957Y2 (en:Method) 1991-09-27

Family

ID=31451511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16522287U Expired JPH0345957Y2 (en:Method) 1987-10-28 1987-10-28

Country Status (1)

Country Link
JP (1) JPH0345957Y2 (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010502833A (ja) * 2006-08-31 2010-01-28 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 制御された固体モルフォロジを利用する、固体前駆体に基づいた流体の送出

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4083512B2 (ja) * 2002-08-30 2008-04-30 東京エレクトロン株式会社 基板処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010502833A (ja) * 2006-08-31 2010-01-28 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド 制御された固体モルフォロジを利用する、固体前駆体に基づいた流体の送出

Also Published As

Publication number Publication date
JPH0345957Y2 (en:Method) 1991-09-27

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