JPH0365239U - - Google Patents
Info
- Publication number
- JPH0365239U JPH0365239U JP12663289U JP12663289U JPH0365239U JP H0365239 U JPH0365239 U JP H0365239U JP 12663289 U JP12663289 U JP 12663289U JP 12663289 U JP12663289 U JP 12663289U JP H0365239 U JPH0365239 U JP H0365239U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- gas
- susceptor
- ejecting
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 7
- 239000012495 reaction gas Substances 0.000 claims description 4
- 239000000376 reactant Substances 0.000 claims 3
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12663289U JPH0365239U (en:Method) | 1989-10-31 | 1989-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12663289U JPH0365239U (en:Method) | 1989-10-31 | 1989-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0365239U true JPH0365239U (en:Method) | 1991-06-25 |
Family
ID=31674435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12663289U Pending JPH0365239U (en:Method) | 1989-10-31 | 1989-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0365239U (en:Method) |
-
1989
- 1989-10-31 JP JP12663289U patent/JPH0365239U/ja active Pending