JPH0179827U - - Google Patents
Info
- Publication number
- JPH0179827U JPH0179827U JP1987175107U JP17510787U JPH0179827U JP H0179827 U JPH0179827 U JP H0179827U JP 1987175107 U JP1987175107 U JP 1987175107U JP 17510787 U JP17510787 U JP 17510787U JP H0179827 U JPH0179827 U JP H0179827U
- Authority
- JP
- Japan
- Prior art keywords
- bell gear
- ring
- gear
- top surface
- inner bell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 3
- 239000001257 hydrogen Substances 0.000 claims 2
- 229910052739 hydrogen Inorganic materials 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 238000012856 packing Methods 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 229910021419 crystalline silicon Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
- 150000003377 silicon compounds Chemical class 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 claims 1
- 239000010935 stainless steel Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17510787U JPH0521870Y2 (https=) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17510787U JPH0521870Y2 (https=) | 1987-11-18 | 1987-11-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0179827U true JPH0179827U (https=) | 1989-05-29 |
| JPH0521870Y2 JPH0521870Y2 (https=) | 1993-06-04 |
Family
ID=31466921
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17510787U Expired - Lifetime JPH0521870Y2 (https=) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521870Y2 (https=) |
-
1987
- 1987-11-18 JP JP17510787U patent/JPH0521870Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521870Y2 (https=) | 1993-06-04 |
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