JPH0171446U - - Google Patents
Info
- Publication number
- JPH0171446U JPH0171446U JP1987166691U JP16669187U JPH0171446U JP H0171446 U JPH0171446 U JP H0171446U JP 1987166691 U JP1987166691 U JP 1987166691U JP 16669187 U JP16669187 U JP 16669187U JP H0171446 U JPH0171446 U JP H0171446U
- Authority
- JP
- Japan
- Prior art keywords
- pellets
- wafer sheet
- adsorbent
- adsorbing
- pushed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 7
- 239000003463 adsorbent Substances 0.000 claims 3
- 230000003760 hair shine Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の一実施例を示す説明図である
。
１：ペレツト、２：ウエハシート、３：吸着体
、３ｃ：凹凸、４：突き上げ針、５：吸着ノズル
、６：カメラ。
FIG. 1 is an explanatory diagram showing an embodiment of the present invention. 1: pellet, 2: wafer sheet, 3: suction body, 3c: unevenness, 4: push-up needle, 5: suction nozzle, 6: camera.
Claims (1)
枠体と、この枠体をＸＹ方向に移動させるＸＹテ
ーブルと、前記ウエハシートを吸着する吸着体と
、前記ウエハシートを前記吸着体を吸着している
状態でウエハシート上のペレツトを突き上げる突
き上げ針と、突き上げられたペレツトを吸着して
移送する吸着ノズルと、前記突き上げられるペレ
ツト上に光を当て、その反射光によつてペレツト
を検出するカメラとを備えたペレツトピツクアツ
プ装置において、前記吸着体のウエハシート接触
面には、光を乱反射させる微細な凹凸が形成され
ていることを特徴とするペレツトピツクアツプ装
置。 A frame for fixing a wafer sheet to which pellets are adhered, an XY table for moving this frame in the XY direction, an adsorbent for adsorbing the wafer sheet, and a state in which the adsorbent is adsorbing the wafer sheet. The device is equipped with a push-up needle that pushes up pellets on a wafer sheet, a suction nozzle that attracts and transfers the pushed-up pellets, and a camera that shines light onto the pushed-up pellets and detects the pellets by the reflected light. 1. A pellet pick-up apparatus according to the present invention, wherein a surface of the adsorbent that contacts the wafer sheet is formed with fine irregularities that diffusely reflect light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166691U JPH0171446U (en) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166691U JPH0171446U (en) | 1987-10-30 | 1987-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171446U true JPH0171446U (en) | 1989-05-12 |
Family
ID=31454304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987166691U Pending JPH0171446U (en) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171446U (en) |
-
1987
- 1987-10-30 JP JP1987166691U patent/JPH0171446U/ja active Pending
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