JPH0170328U - - Google Patents
Info
- Publication number
- JPH0170328U JPH0170328U JP1987164731U JP16473187U JPH0170328U JP H0170328 U JPH0170328 U JP H0170328U JP 1987164731 U JP1987164731 U JP 1987164731U JP 16473187 U JP16473187 U JP 16473187U JP H0170328 U JPH0170328 U JP H0170328U
- Authority
- JP
- Japan
- Prior art keywords
- chemical
- processing
- processing tank
- liquid
- wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000012993 chemical processing Methods 0.000 claims 2
- 238000001914 filtration Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164731U JPH0170328U (xx) | 1987-10-27 | 1987-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987164731U JPH0170328U (xx) | 1987-10-27 | 1987-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170328U true JPH0170328U (xx) | 1989-05-10 |
Family
ID=31450585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987164731U Pending JPH0170328U (xx) | 1987-10-27 | 1987-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170328U (xx) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03296477A (ja) * | 1990-04-16 | 1991-12-27 | Haneda Seisakusho:Kk | 超音波洗浄槽 |
-
1987
- 1987-10-27 JP JP1987164731U patent/JPH0170328U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03296477A (ja) * | 1990-04-16 | 1991-12-27 | Haneda Seisakusho:Kk | 超音波洗浄槽 |