JPS6373364U - - Google Patents
Info
- Publication number
- JPS6373364U JPS6373364U JP16725586U JP16725586U JPS6373364U JP S6373364 U JPS6373364 U JP S6373364U JP 16725586 U JP16725586 U JP 16725586U JP 16725586 U JP16725586 U JP 16725586U JP S6373364 U JPS6373364 U JP S6373364U
- Authority
- JP
- Japan
- Prior art keywords
- tank
- treatment tank
- pump
- overflow
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000008155 medical solution Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725586U JPH0354138Y2 (xx) | 1986-10-30 | 1986-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725586U JPH0354138Y2 (xx) | 1986-10-30 | 1986-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373364U true JPS6373364U (xx) | 1988-05-16 |
| JPH0354138Y2 JPH0354138Y2 (xx) | 1991-11-28 |
Family
ID=31099016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16725586U Expired JPH0354138Y2 (xx) | 1986-10-30 | 1986-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354138Y2 (xx) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276229A (ja) * | 1988-09-12 | 1990-03-15 | Nec Corp | 半導体装置の製造装置 |
| JPH05121392A (ja) * | 1991-10-28 | 1993-05-18 | Sharp Corp | エツチング等の処理槽 |
-
1986
- 1986-10-30 JP JP16725586U patent/JPH0354138Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276229A (ja) * | 1988-09-12 | 1990-03-15 | Nec Corp | 半導体装置の製造装置 |
| JPH05121392A (ja) * | 1991-10-28 | 1993-05-18 | Sharp Corp | エツチング等の処理槽 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0354138Y2 (xx) | 1991-11-28 |