JPS63149526U - - Google Patents
Info
- Publication number
- JPS63149526U JPS63149526U JP4201787U JP4201787U JPS63149526U JP S63149526 U JPS63149526 U JP S63149526U JP 4201787 U JP4201787 U JP 4201787U JP 4201787 U JP4201787 U JP 4201787U JP S63149526 U JPS63149526 U JP S63149526U
- Authority
- JP
- Japan
- Prior art keywords
- pure water
- float
- chemical liquid
- semiconductor wafer
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 5
- 238000005303 weighing Methods 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Accessories For Mixers (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4201787U JPS63149526U (xx) | 1987-03-24 | 1987-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4201787U JPS63149526U (xx) | 1987-03-24 | 1987-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149526U true JPS63149526U (xx) | 1988-10-03 |
Family
ID=30857543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4201787U Pending JPS63149526U (xx) | 1987-03-24 | 1987-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149526U (xx) |
-
1987
- 1987-03-24 JP JP4201787U patent/JPS63149526U/ja active Pending