JPH02125332U - - Google Patents
Info
- Publication number
- JPH02125332U JPH02125332U JP3351189U JP3351189U JPH02125332U JP H02125332 U JPH02125332 U JP H02125332U JP 3351189 U JP3351189 U JP 3351189U JP 3351189 U JP3351189 U JP 3351189U JP H02125332 U JPH02125332 U JP H02125332U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing device
- overflow tank
- inlet
- shower nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
- 238000001914 filtration Methods 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3351189U JPH02125332U (xx) | 1989-03-23 | 1989-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3351189U JPH02125332U (xx) | 1989-03-23 | 1989-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02125332U true JPH02125332U (xx) | 1990-10-16 |
Family
ID=31537224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3351189U Pending JPH02125332U (xx) | 1989-03-23 | 1989-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02125332U (xx) |
-
1989
- 1989-03-23 JP JP3351189U patent/JPH02125332U/ja active Pending