JPH0167752U - - Google Patents
Info
- Publication number
- JPH0167752U JPH0167752U JP1987162630U JP16263087U JPH0167752U JP H0167752 U JPH0167752 U JP H0167752U JP 1987162630 U JP1987162630 U JP 1987162630U JP 16263087 U JP16263087 U JP 16263087U JP H0167752 U JPH0167752 U JP H0167752U
- Authority
- JP
- Japan
- Prior art keywords
- metal pattern
- defective
- marked
- semiconductor device
- changed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000008188 pellet Substances 0.000 claims description 3
- 230000002950 deficient Effects 0.000 claims 1
- 230000007547 defect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案に係る半導体装置の一実施例を
示すペレツトの平面図、第２図と第３図は本考案
に係る金属パターンの一実施例を示す格子状パタ
ーンとそれに付けられた不良マークの平面図、第
４図乃至第８図は本考案に係る金属パターンの各
実施例を示す各平面図、第９図は半導体ウエーハ
の平面図である。
２……ペレツト、４……金属パターン。
FIG. 1 is a plan view of a pellet showing an embodiment of a semiconductor device according to the present invention, and FIGS. 2 and 3 are a grid pattern and defects attached thereto, showing an embodiment of a metal pattern according to the present invention. A plan view of the mark, FIGS. 4 to 8 are plan views showing each embodiment of the metal pattern according to the present invention, and FIG. 9 is a plan view of a semiconductor wafer. 2...Pellet, 4...Metal pattern.
Claims (1)
トの表面の電極パツドを除く任意の位置に、レー
ザ照射によつてパターンが変化して不良マーキン
グされる金属パターンを形成したことを特徴とす
る半導体装置。 A semiconductor device characterized in that a metal pattern whose pattern is changed by laser irradiation and marked as defective is formed at any position other than an electrode pad on the surface of each pellet formed in large numbers on a semiconductor wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162630U JPH0167752U (en) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162630U JPH0167752U (en) | 1987-10-23 | 1987-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167752U true JPH0167752U (en) | 1989-05-01 |
Family
ID=31446627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162630U Pending JPH0167752U (en) | 1987-10-23 | 1987-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167752U (en) |
-
1987
- 1987-10-23 JP JP1987162630U patent/JPH0167752U/ja active Pending