JPH0167737U - - Google Patents
Info
- Publication number
- JPH0167737U JPH0167737U JP1987162367U JP16236787U JPH0167737U JP H0167737 U JPH0167737 U JP H0167737U JP 1987162367 U JP1987162367 U JP 1987162367U JP 16236787 U JP16236787 U JP 16236787U JP H0167737 U JPH0167737 U JP H0167737U
- Authority
- JP
- Japan
- Prior art keywords
- etched
- reaction chamber
- showing
- exciting
- surround
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162367U JPH0167737U (de) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162367U JPH0167737U (de) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167737U true JPH0167737U (de) | 1989-05-01 |
Family
ID=31446126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162367U Pending JPH0167737U (de) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167737U (de) |
-
1987
- 1987-10-22 JP JP1987162367U patent/JPH0167737U/ja active Pending