JPS61199039U - - Google Patents
Info
- Publication number
- JPS61199039U JPS61199039U JP8323485U JP8323485U JPS61199039U JP S61199039 U JPS61199039 U JP S61199039U JP 8323485 U JP8323485 U JP 8323485U JP 8323485 U JP8323485 U JP 8323485U JP S61199039 U JPS61199039 U JP S61199039U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- etching apparatus
- plasma dry
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 3
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8323485U JPS61199039U (de) | 1985-05-31 | 1985-05-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8323485U JPS61199039U (de) | 1985-05-31 | 1985-05-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199039U true JPS61199039U (de) | 1986-12-12 |
Family
ID=30631675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8323485U Pending JPS61199039U (de) | 1985-05-31 | 1985-05-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199039U (de) |
-
1985
- 1985-05-31 JP JP8323485U patent/JPS61199039U/ja active Pending