JPH0456332U - - Google Patents
Info
- Publication number
- JPH0456332U JPH0456332U JP9998490U JP9998490U JPH0456332U JP H0456332 U JPH0456332 U JP H0456332U JP 9998490 U JP9998490 U JP 9998490U JP 9998490 U JP9998490 U JP 9998490U JP H0456332 U JPH0456332 U JP H0456332U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- electrode provided
- insulator
- wafer
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 2
- 238000001020 plasma etching Methods 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998490U JPH0456332U (de) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9998490U JPH0456332U (de) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0456332U true JPH0456332U (de) | 1992-05-14 |
Family
ID=31842294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9998490U Pending JPH0456332U (de) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0456332U (de) |
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1990
- 1990-09-25 JP JP9998490U patent/JPH0456332U/ja active Pending