JPS6436955U - - Google Patents
Info
- Publication number
- JPS6436955U JPS6436955U JP13200787U JP13200787U JPS6436955U JP S6436955 U JPS6436955 U JP S6436955U JP 13200787 U JP13200787 U JP 13200787U JP 13200787 U JP13200787 U JP 13200787U JP S6436955 U JPS6436955 U JP S6436955U
- Authority
- JP
- Japan
- Prior art keywords
- lid
- ring
- source device
- ion source
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13200787U JPS6436955U (de) | 1987-08-29 | 1987-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13200787U JPS6436955U (de) | 1987-08-29 | 1987-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6436955U true JPS6436955U (de) | 1989-03-06 |
Family
ID=31388584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13200787U Pending JPS6436955U (de) | 1987-08-29 | 1987-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6436955U (de) |
-
1987
- 1987-08-29 JP JP13200787U patent/JPS6436955U/ja active Pending