JPS62186353U - - Google Patents
Info
- Publication number
- JPS62186353U JPS62186353U JP7268586U JP7268586U JPS62186353U JP S62186353 U JPS62186353 U JP S62186353U JP 7268586 U JP7268586 U JP 7268586U JP 7268586 U JP7268586 U JP 7268586U JP S62186353 U JPS62186353 U JP S62186353U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- ion source
- implantation apparatus
- disposed
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 2
- 238000010891 electric arc Methods 0.000 claims 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268586U JPS62186353U (de) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268586U JPS62186353U (de) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186353U true JPS62186353U (de) | 1987-11-27 |
Family
ID=30916355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7268586U Pending JPS62186353U (de) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186353U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08124504A (ja) * | 1994-10-25 | 1996-05-17 | Hiroshima Nippon Denki Kk | 熱電子放射高電流フィラメントイオンソース |
-
1986
- 1986-05-16 JP JP7268586U patent/JPS62186353U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08124504A (ja) * | 1994-10-25 | 1996-05-17 | Hiroshima Nippon Denki Kk | 熱電子放射高電流フィラメントイオンソース |