JPH0374665U - - Google Patents
Info
- Publication number
- JPH0374665U JPH0374665U JP13558289U JP13558289U JPH0374665U JP H0374665 U JPH0374665 U JP H0374665U JP 13558289 U JP13558289 U JP 13558289U JP 13558289 U JP13558289 U JP 13558289U JP H0374665 U JPH0374665 U JP H0374665U
- Authority
- JP
- Japan
- Prior art keywords
- processing apparatus
- plasma processing
- reaction gas
- peripheral wall
- predetermined position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012495 reaction gas Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13558289U JPH0374665U (de) | 1989-11-22 | 1989-11-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13558289U JPH0374665U (de) | 1989-11-22 | 1989-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374665U true JPH0374665U (de) | 1991-07-26 |
Family
ID=31682843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13558289U Pending JPH0374665U (de) | 1989-11-22 | 1989-11-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374665U (de) |
-
1989
- 1989-11-22 JP JP13558289U patent/JPH0374665U/ja active Pending