JPS6186461U - - Google Patents
Info
- Publication number
- JPS6186461U JPS6186461U JP17161384U JP17161384U JPS6186461U JP S6186461 U JPS6186461 U JP S6186461U JP 17161384 U JP17161384 U JP 17161384U JP 17161384 U JP17161384 U JP 17161384U JP S6186461 U JPS6186461 U JP S6186461U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- etching device
- electrode
- high frequency
- frequency power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17161384U JPS6186461U (de) | 1984-11-14 | 1984-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17161384U JPS6186461U (de) | 1984-11-14 | 1984-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6186461U true JPS6186461U (de) | 1986-06-06 |
Family
ID=30729289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17161384U Pending JPS6186461U (de) | 1984-11-14 | 1984-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186461U (de) |
-
1984
- 1984-11-14 JP JP17161384U patent/JPS6186461U/ja active Pending