JPH0166747U - - Google Patents
Info
- Publication number
- JPH0166747U JPH0166747U JP1987162430U JP16243087U JPH0166747U JP H0166747 U JPH0166747 U JP H0166747U JP 1987162430 U JP1987162430 U JP 1987162430U JP 16243087 U JP16243087 U JP 16243087U JP H0166747 U JPH0166747 U JP H0166747U
- Authority
- JP
- Japan
- Prior art keywords
- backscattered electron
- detection device
- faraday cup
- backscattered
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162430U JPH0166747U (cs) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162430U JPH0166747U (cs) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166747U true JPH0166747U (cs) | 1989-04-28 |
Family
ID=31446248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162430U Pending JPH0166747U (cs) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166747U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165438A (ja) * | 1989-11-24 | 1991-07-17 | Nippon Denshi Tekunikusu Kk | 荷電粒子線装置 |
-
1987
- 1987-10-26 JP JP1987162430U patent/JPH0166747U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03165438A (ja) * | 1989-11-24 | 1991-07-17 | Nippon Denshi Tekunikusu Kk | 荷電粒子線装置 |
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