JPH0364462U - - Google Patents
Info
- Publication number
- JPH0364462U JPH0364462U JP12526889U JP12526889U JPH0364462U JP H0364462 U JPH0364462 U JP H0364462U JP 12526889 U JP12526889 U JP 12526889U JP 12526889 U JP12526889 U JP 12526889U JP H0364462 U JPH0364462 U JP H0364462U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- tilting
- vertical movement
- optical axis
- aperture plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12526889U JPH0364462U (cs) | 1989-10-26 | 1989-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12526889U JPH0364462U (cs) | 1989-10-26 | 1989-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0364462U true JPH0364462U (cs) | 1991-06-24 |
Family
ID=31673147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12526889U Pending JPH0364462U (cs) | 1989-10-26 | 1989-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0364462U (cs) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120758A (en) * | 1976-04-05 | 1977-10-11 | Hitachi Ltd | Electronic microscope |
| JPS5413765A (en) * | 1977-07-04 | 1979-02-01 | Jeol Ltd | Sample slanting equipment of scanning electron microscope or the like |
| JPS61220256A (ja) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | 試料微動装置 |
-
1989
- 1989-10-26 JP JP12526889U patent/JPH0364462U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120758A (en) * | 1976-04-05 | 1977-10-11 | Hitachi Ltd | Electronic microscope |
| JPS5413765A (en) * | 1977-07-04 | 1979-02-01 | Jeol Ltd | Sample slanting equipment of scanning electron microscope or the like |
| JPS61220256A (ja) * | 1985-03-27 | 1986-09-30 | Hitachi Ltd | 試料微動装置 |
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