JPH0163137U - - Google Patents

Info

Publication number
JPH0163137U
JPH0163137U JP1987158263U JP15826387U JPH0163137U JP H0163137 U JPH0163137 U JP H0163137U JP 1987158263 U JP1987158263 U JP 1987158263U JP 15826387 U JP15826387 U JP 15826387U JP H0163137 U JPH0163137 U JP H0163137U
Authority
JP
Japan
Prior art keywords
wafer boxes
storage shelf
shelf device
transfer machine
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987158263U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987158263U priority Critical patent/JPH0163137U/ja
Publication of JPH0163137U publication Critical patent/JPH0163137U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP1987158263U 1987-10-16 1987-10-16 Pending JPH0163137U (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987158263U JPH0163137U (nl) 1987-10-16 1987-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987158263U JPH0163137U (nl) 1987-10-16 1987-10-16

Publications (1)

Publication Number Publication Date
JPH0163137U true JPH0163137U (nl) 1989-04-24

Family

ID=31438432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987158263U Pending JPH0163137U (nl) 1987-10-16 1987-10-16

Country Status (1)

Country Link
JP (1) JPH0163137U (nl)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
JP2011187796A (ja) * 2010-03-10 2011-09-22 Sokudo Co Ltd 基板処理装置、ストッカー装置および基板収納容器の搬送方法
WO2017141555A1 (ja) * 2016-02-15 2017-08-24 村田機械株式会社 保管装置及び搬送システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001274218A (ja) * 2000-03-23 2001-10-05 Sankyo Seiki Mfg Co Ltd ダブルアーム型ロボット
JP2011187796A (ja) * 2010-03-10 2011-09-22 Sokudo Co Ltd 基板処理装置、ストッカー装置および基板収納容器の搬送方法
US9728434B2 (en) 2010-03-10 2017-08-08 Screen Semiconductor Solutions Co., Ltd. Substrate processing apparatus, storage device, and method of transporting substrate storing container
WO2017141555A1 (ja) * 2016-02-15 2017-08-24 村田機械株式会社 保管装置及び搬送システム

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