JPH0180934U - - Google Patents
Info
- Publication number
- JPH0180934U JPH0180934U JP1987176809U JP17680987U JPH0180934U JP H0180934 U JPH0180934 U JP H0180934U JP 1987176809 U JP1987176809 U JP 1987176809U JP 17680987 U JP17680987 U JP 17680987U JP H0180934 U JPH0180934 U JP H0180934U
- Authority
- JP
- Japan
- Prior art keywords
- section
- cassette
- processing
- surface treatment
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 9
- 230000032258 transport Effects 0.000 claims 6
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17680987U JP2544056Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハの表面処理装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17680987U JP2544056Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハの表面処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0180934U true JPH0180934U (nl) | 1989-05-30 |
JP2544056Y2 JP2544056Y2 (ja) | 1997-08-13 |
Family
ID=31468512
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17680987U Expired - Lifetime JP2544056Y2 (ja) | 1987-11-19 | 1987-11-19 | ウエハの表面処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2544056Y2 (nl) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000003894A (ja) * | 1999-05-10 | 2000-01-07 | Tokyo Electron Ltd | 洗浄装置及びその方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110299313B (zh) * | 2019-07-04 | 2022-09-16 | 北京北方华创微电子装备有限公司 | 清洗装置和清洗方法 |
-
1987
- 1987-11-19 JP JP17680987U patent/JP2544056Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000003894A (ja) * | 1999-05-10 | 2000-01-07 | Tokyo Electron Ltd | 洗浄装置及びその方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2544056Y2 (ja) | 1997-08-13 |
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