JPH0161251B2 - - Google Patents
Info
- Publication number
- JPH0161251B2 JPH0161251B2 JP56169638A JP16963881A JPH0161251B2 JP H0161251 B2 JPH0161251 B2 JP H0161251B2 JP 56169638 A JP56169638 A JP 56169638A JP 16963881 A JP16963881 A JP 16963881A JP H0161251 B2 JPH0161251 B2 JP H0161251B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- crystal resonator
- excitation
- shows
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 62
- 230000005284 excitation Effects 0.000 claims description 30
- 238000007740 vapor deposition Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 238000000206 photolithography Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 229910000679 solder Inorganic materials 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02102—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
- H03H2003/0414—Resonance frequency
- H03H2003/0421—Modification of the thickness of an element
- H03H2003/0428—Modification of the thickness of an element of an electrode
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16963881A JPS5870612A (ja) | 1981-10-23 | 1981-10-23 | 結合水晶振動子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16963881A JPS5870612A (ja) | 1981-10-23 | 1981-10-23 | 結合水晶振動子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5870612A JPS5870612A (ja) | 1983-04-27 |
JPH0161251B2 true JPH0161251B2 (el) | 1989-12-27 |
Family
ID=15890198
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16963881A Granted JPS5870612A (ja) | 1981-10-23 | 1981-10-23 | 結合水晶振動子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5870612A (el) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02186817A (ja) * | 1989-01-13 | 1990-07-23 | Seiko Electronic Components Ltd | 輪郭すべり水晶振動子 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533178A (en) * | 1976-06-30 | 1978-01-12 | Seiko Instr & Electronics Ltd | Crystal vibrator |
JPS5379396A (en) * | 1976-12-23 | 1978-07-13 | Nec Corp | Square plate form piezoelectric ceramic vibrator |
JPS5469986A (en) * | 1977-11-15 | 1979-06-05 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
-
1981
- 1981-10-23 JP JP16963881A patent/JPS5870612A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533178A (en) * | 1976-06-30 | 1978-01-12 | Seiko Instr & Electronics Ltd | Crystal vibrator |
JPS5379396A (en) * | 1976-12-23 | 1978-07-13 | Nec Corp | Square plate form piezoelectric ceramic vibrator |
JPS5469986A (en) * | 1977-11-15 | 1979-06-05 | Seiko Instr & Electronics Ltd | Piezoelectric vibrator |
Also Published As
Publication number | Publication date |
---|---|
JPS5870612A (ja) | 1983-04-27 |
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