JPH0160532U - - Google Patents
Info
- Publication number
- JPH0160532U JPH0160532U JP15710387U JP15710387U JPH0160532U JP H0160532 U JPH0160532 U JP H0160532U JP 15710387 U JP15710387 U JP 15710387U JP 15710387 U JP15710387 U JP 15710387U JP H0160532 U JPH0160532 U JP H0160532U
- Authority
- JP
- Japan
- Prior art keywords
- chemical liquid
- liquid processing
- processing apparatus
- semiconductor substrates
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000003756 stirring Methods 0.000 claims 1
- 238000010129 solution processing Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15710387U JPH0160532U (US20020051482A1-20020502-M00012.png) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15710387U JPH0160532U (US20020051482A1-20020502-M00012.png) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0160532U true JPH0160532U (US20020051482A1-20020502-M00012.png) | 1989-04-17 |
Family
ID=31436252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15710387U Pending JPH0160532U (US20020051482A1-20020502-M00012.png) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0160532U (US20020051482A1-20020502-M00012.png) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141270A (US20020051482A1-20020502-M00012.png) * | 1974-04-30 | 1975-11-13 | ||
| JPS5441674A (en) * | 1977-09-09 | 1979-04-03 | Hitachi Ltd | Etching method |
| JPS5617021A (en) * | 1979-07-20 | 1981-02-18 | Fujitsu Ltd | Surface treatment of substrate |
| JPS6034538B2 (ja) * | 1977-05-02 | 1985-08-09 | 塩野義製薬株式会社 | ２−クロル−２−ヒドロキシイミノ酢酸アルキルエステルの合成法 |
| JPS6039242B2 (ja) * | 1978-06-29 | 1985-09-05 | 花王株式会社 | 殺線虫剤 |
| JPS6180825A (ja) * | 1984-09-28 | 1986-04-24 | Hitachi Ltd | 液体処理装置 |
| JPS61218416A (ja) * | 1985-03-22 | 1986-09-27 | Mitsubishi Electric Corp | 自動車用暖房装置 |
| JPS62132325A (ja) * | 1985-12-05 | 1987-06-15 | Tdk Corp | ウエフアのエツチング方法およびそれに用いるウエフア・キヤリア |
| JPS6346212B2 (US20020051482A1-20020502-M00012.png) * | 1984-01-23 | 1988-09-14 | Kogyo Gijutsuin |
-
1987
- 1987-10-13 JP JP15710387U patent/JPH0160532U/ja active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50141270A (US20020051482A1-20020502-M00012.png) * | 1974-04-30 | 1975-11-13 | ||
| JPS6034538B2 (ja) * | 1977-05-02 | 1985-08-09 | 塩野義製薬株式会社 | ２−クロル−２−ヒドロキシイミノ酢酸アルキルエステルの合成法 |
| JPS5441674A (en) * | 1977-09-09 | 1979-04-03 | Hitachi Ltd | Etching method |
| JPS6039242B2 (ja) * | 1978-06-29 | 1985-09-05 | 花王株式会社 | 殺線虫剤 |
| JPS5617021A (en) * | 1979-07-20 | 1981-02-18 | Fujitsu Ltd | Surface treatment of substrate |
| JPS6346212B2 (US20020051482A1-20020502-M00012.png) * | 1984-01-23 | 1988-09-14 | Kogyo Gijutsuin | |
| JPS6180825A (ja) * | 1984-09-28 | 1986-04-24 | Hitachi Ltd | 液体処理装置 |
| JPS61218416A (ja) * | 1985-03-22 | 1986-09-27 | Mitsubishi Electric Corp | 自動車用暖房装置 |
| JPS62132325A (ja) * | 1985-12-05 | 1987-06-15 | Tdk Corp | ウエフアのエツチング方法およびそれに用いるウエフア・キヤリア |
