JPH0160132B2 - - Google Patents
Info
- Publication number
- JPH0160132B2 JPH0160132B2 JP5774682A JP5774682A JPH0160132B2 JP H0160132 B2 JPH0160132 B2 JP H0160132B2 JP 5774682 A JP5774682 A JP 5774682A JP 5774682 A JP5774682 A JP 5774682A JP H0160132 B2 JPH0160132 B2 JP H0160132B2
- Authority
- JP
- Japan
- Prior art keywords
- dioxane
- polymer
- solution
- water
- hydroxyethyl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5774682A JPS5833241A (ja) | 1982-04-07 | 1982-04-07 | フリ−ラジカル系感光性樹脂組成物の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5774682A JPS5833241A (ja) | 1982-04-07 | 1982-04-07 | フリ−ラジカル系感光性樹脂組成物の製造方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3760274A Division JPS5741482B2 (de) | 1974-04-03 | 1974-04-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5833241A JPS5833241A (ja) | 1983-02-26 |
| JPH0160132B2 true JPH0160132B2 (de) | 1989-12-21 |
Family
ID=13064460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5774682A Granted JPS5833241A (ja) | 1982-04-07 | 1982-04-07 | フリ−ラジカル系感光性樹脂組成物の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5833241A (de) |
-
1982
- 1982-04-07 JP JP5774682A patent/JPS5833241A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5833241A (ja) | 1983-02-26 |
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