JPH0156547B2 - - Google Patents
Info
- Publication number
- JPH0156547B2 JPH0156547B2 JP55000508A JP50880A JPH0156547B2 JP H0156547 B2 JPH0156547 B2 JP H0156547B2 JP 55000508 A JP55000508 A JP 55000508A JP 50880 A JP50880 A JP 50880A JP H0156547 B2 JPH0156547 B2 JP H0156547B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- layer
- semiconductor
- substrate
- reflecting mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 37
- 239000010409 thin film Substances 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 238000009792 diffusion process Methods 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 13
- 239000010408 film Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 229910001297 Zn alloy Inorganic materials 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 239000010931 gold Substances 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 229910015363 Au—Sn Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50880A JPS5698888A (en) | 1980-01-09 | 1980-01-09 | Light emitting semiconductor laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50880A JPS5698888A (en) | 1980-01-09 | 1980-01-09 | Light emitting semiconductor laser |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5698888A JPS5698888A (en) | 1981-08-08 |
JPH0156547B2 true JPH0156547B2 (fr) | 1989-11-30 |
Family
ID=11475705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50880A Granted JPS5698888A (en) | 1980-01-09 | 1980-01-09 | Light emitting semiconductor laser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5698888A (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58215087A (ja) * | 1982-06-07 | 1983-12-14 | Tokyo Inst Of Technol | 面発光形レ−ザ素子の製造方法 |
JPS6032381A (ja) * | 1983-08-01 | 1985-02-19 | Matsushita Electric Ind Co Ltd | 面発光半導体レ−ザ装置 |
JPS6140077A (ja) * | 1984-07-31 | 1986-02-26 | Res Dev Corp Of Japan | GaAs/GaAlAs埋め込み型面発光レーザ発振装置の製造方法 |
JPS6376390A (ja) * | 1986-09-18 | 1988-04-06 | Nec Corp | 発光半導体素子 |
KR100274283B1 (ko) * | 1991-03-28 | 2001-01-15 | 야스카와 히데아키 | 면 발광형 반도체 레이저 및 그 제조 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5367391A (en) * | 1976-11-29 | 1978-06-15 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor laser device |
JPS5451491A (en) * | 1977-09-30 | 1979-04-23 | Hitachi Ltd | Semiconductor laser |
JPS5511338A (en) * | 1978-07-10 | 1980-01-26 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor laser device |
-
1980
- 1980-01-09 JP JP50880A patent/JPS5698888A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5367391A (en) * | 1976-11-29 | 1978-06-15 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor laser device |
JPS5451491A (en) * | 1977-09-30 | 1979-04-23 | Hitachi Ltd | Semiconductor laser |
JPS5511338A (en) * | 1978-07-10 | 1980-01-26 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor laser device |
Also Published As
Publication number | Publication date |
---|---|
JPS5698888A (en) | 1981-08-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4633476A (en) | Semiconductor laser with internal reflectors and vertical output | |
US4805179A (en) | Transverse junction stripe laser | |
JPS63318195A (ja) | 横方向埋め込み型面発光レ−ザ | |
US5253263A (en) | High-power surface-emitting semiconductor injection laser with etched internal 45 degree and 90 degree micromirrors | |
JP3095545B2 (ja) | 面発光型半導体発光装置およびその製造方法 | |
JPH0669111B2 (ja) | 自己整合性リブ導波路高出力レーザー | |
JP2857256B2 (ja) | 垂直型半導体レーザ | |
JPH07107949B2 (ja) | フエイズドアレイ半導体レ−ザ− | |
JPH04225588A (ja) | 半導体レーザ構造体 | |
US4280108A (en) | Transverse junction array laser | |
JPS6343908B2 (fr) | ||
US4636821A (en) | Surface-emitting semiconductor elements | |
JPH0156547B2 (fr) | ||
US20100020836A1 (en) | Use of current channeling in multiple node laser systems and methods thereof | |
US4821278A (en) | Inverted channel substrate planar semiconductor laser | |
JPS6083389A (ja) | 面発光レ−ザ発振装置 | |
JP2927661B2 (ja) | スーパールミネッセントダイオード素子およびその製造方法 | |
JP2546150B2 (ja) | 立体共振器型面発光レーザ | |
JPH0671121B2 (ja) | 半導体レーザ装置 | |
JPH04192483A (ja) | 半導体アレイレーザ装置 | |
JPH0478036B2 (fr) | ||
JPH03253089A (ja) | 半導体ダイオードレーザ及びその製造方法 | |
JPH05243678A (ja) | 半導体レーザおよびその製造方法 | |
EP0144205B1 (fr) | Laser à semi-conducteur | |
JP3674139B2 (ja) | 可視光半導体レーザ |