JPH0155408B2 - - Google Patents
Info
- Publication number
- JPH0155408B2 JPH0155408B2 JP56185416A JP18541681A JPH0155408B2 JP H0155408 B2 JPH0155408 B2 JP H0155408B2 JP 56185416 A JP56185416 A JP 56185416A JP 18541681 A JP18541681 A JP 18541681A JP H0155408 B2 JPH0155408 B2 JP H0155408B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- depth
- sensor
- focus
- plane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000523 sample Substances 0.000 description 26
- 238000002604 ultrasonography Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56185416A JPS5887455A (ja) | 1981-11-20 | 1981-11-20 | 超音波顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56185416A JPS5887455A (ja) | 1981-11-20 | 1981-11-20 | 超音波顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5887455A JPS5887455A (ja) | 1983-05-25 |
| JPH0155408B2 true JPH0155408B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-11-24 |
Family
ID=16170400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56185416A Granted JPS5887455A (ja) | 1981-11-20 | 1981-11-20 | 超音波顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5887455A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1981
- 1981-11-20 JP JP56185416A patent/JPS5887455A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5887455A (ja) | 1983-05-25 |