JPH0152693B2 - - Google Patents

Info

Publication number
JPH0152693B2
JPH0152693B2 JP56081040A JP8104081A JPH0152693B2 JP H0152693 B2 JPH0152693 B2 JP H0152693B2 JP 56081040 A JP56081040 A JP 56081040A JP 8104081 A JP8104081 A JP 8104081A JP H0152693 B2 JPH0152693 B2 JP H0152693B2
Authority
JP
Japan
Prior art keywords
sample
sample stage
vertical
compressed air
vertical bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56081040A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57197442A (en
Inventor
Kyoshi Ishikawa
Hiroshi Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Construction Machinery Co Ltd
Original Assignee
Hitachi Construction Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Construction Machinery Co Ltd filed Critical Hitachi Construction Machinery Co Ltd
Priority to JP56081040A priority Critical patent/JPS57197442A/ja
Publication of JPS57197442A publication Critical patent/JPS57197442A/ja
Publication of JPH0152693B2 publication Critical patent/JPH0152693B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Optical Measuring Cells (AREA)
JP56081040A 1981-05-29 1981-05-29 Sample moving base Granted JPS57197442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56081040A JPS57197442A (en) 1981-05-29 1981-05-29 Sample moving base

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56081040A JPS57197442A (en) 1981-05-29 1981-05-29 Sample moving base

Publications (2)

Publication Number Publication Date
JPS57197442A JPS57197442A (en) 1982-12-03
JPH0152693B2 true JPH0152693B2 (cg-RX-API-DMAC7.html) 1989-11-09

Family

ID=13735325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56081040A Granted JPS57197442A (en) 1981-05-29 1981-05-29 Sample moving base

Country Status (1)

Country Link
JP (1) JPS57197442A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100721902B1 (ko) 2005-07-04 2007-05-28 주식회사 쎄크 엑스레이 계측장비

Also Published As

Publication number Publication date
JPS57197442A (en) 1982-12-03

Similar Documents

Publication Publication Date Title
US6188195B1 (en) Exposure method, and method of making exposure apparatus having dynamically isolated support structure
US5530516A (en) Large-area projection exposure system
AU2012306571B2 (en) Focus and imaging system and techniques using error signal
JP6578534B1 (ja) 超音波高速スキャン装置
US6008500A (en) Exposure apparatus having dynamically isolated reaction frame
JPH07254555A (ja) 露光装置
WO2017049671A1 (zh) 基于扫描电子显微镜的微操作系统
TWI260646B (en) X-Y axis stage device
JPH0152693B2 (cg-RX-API-DMAC7.html)
KR100869921B1 (ko) 스테이지용 반력처리장치
JP3687362B2 (ja) ２軸移動装置
JP2002082036A (ja) 走査型プローブ顕微鏡用スキャナー
JP2004317485A (ja) Ｘ−ｙステージ装置
US6628435B1 (en) Contact-less ballistic scanning method
JPH11142557A (ja) 垂直ステージ装置
JP3721850B2 (ja) 電子顕微鏡および試料ステージ
JP2000120685A (ja) 静圧空気軸受直線案内装置
JPH0427498B2 (cg-RX-API-DMAC7.html)
JP2000058629A (ja) ステージ装置及びこれを用いた電子ビーム描画装置
JPH03221336A (ja) 可動ステージ装置
JPH03208533A (ja) Ｘｙテーブル
JPH0231345B2 (cg-RX-API-DMAC7.html)
JP3715742B2 (ja) 静圧ステージ
JP2020085878A (ja) 吊り下げ式両面光学検査装置
JP2005052823A (ja) テーブルコータ機用ステージ装置