JPH01500892A - 圧電動作形流体ポンプ - Google Patents
圧電動作形流体ポンプInfo
- Publication number
- JPH01500892A JPH01500892A JP62503037A JP50303787A JPH01500892A JP H01500892 A JPH01500892 A JP H01500892A JP 62503037 A JP62503037 A JP 62503037A JP 50303787 A JP50303787 A JP 50303787A JP H01500892 A JPH01500892 A JP H01500892A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- membrane
- excited
- range
- piezoelectric effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title description 7
- 239000012528 membrane Substances 0.000 claims description 34
- 230000000694 effects Effects 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 7
- 230000003068 static effect Effects 0.000 claims description 7
- 230000008602 contraction Effects 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 18
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 7
- 208000000260 Warts Diseases 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 201000010153 skin papilloma Diseases 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000001994 activation Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005323 electroforming Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 210000003127 knee Anatomy 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 241000345998 Calamus manan Species 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- PJYYBCXMCWDUAZ-YKDQUOQBSA-N Ponasterone A Natural products O=C1[C@H]2[C@@](C)([C@@H]3C([C@@]4(O)[C@@](C)([C@H]([C@@](O)([C@@H](O)CCC(C)C)C)CC4)CC3)=C1)C[C@H](O)[C@H](O)C2 PJYYBCXMCWDUAZ-YKDQUOQBSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 210000003041 ligament Anatomy 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 235000012950 rattan cane Nutrition 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14338—Multiple pressure elements per ink chamber
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2400/00—Loudspeakers
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE3618106.4 | 1986-05-30 | ||
DE19863618106 DE3618106A1 (de) | 1986-05-30 | 1986-05-30 | Piezoelektrisch betriebene fluidpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01500892A true JPH01500892A (ja) | 1989-03-30 |
Family
ID=6301881
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62503037A Pending JPH01500892A (ja) | 1986-05-30 | 1987-05-19 | 圧電動作形流体ポンプ |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0310605A1 (de) |
JP (1) | JPH01500892A (de) |
DE (1) | DE3618106A1 (de) |
WO (1) | WO1987007218A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8308454B2 (en) | 2007-03-12 | 2012-11-13 | Murata Manufacturing Co., Ltd. | Fluid conveyance device |
CN105201796A (zh) * | 2015-10-29 | 2015-12-30 | 宁波大学 | 一种压电蠕动微泵 |
Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3814150A1 (de) * | 1988-04-27 | 1989-11-09 | Draegerwerk Ag | Ventilanordnung aus mikrostrukturierten komponenten |
CH679555A5 (de) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd | |
US5205819A (en) * | 1989-05-11 | 1993-04-27 | Bespak Plc | Pump apparatus for biomedical use |
GB9004602D0 (en) * | 1990-03-01 | 1990-04-25 | Jones Clifton Products Ltd | Improvements in or relating to electrically controlled fluid valves |
US5262696A (en) * | 1991-07-05 | 1993-11-16 | Rockwell International Corporation | Biaxial transducer |
DE59600973D1 (en) * | 1995-09-15 | 1999-01-21 | Hahn Schickard Ges | Rückschlagventillose fluidpumpe |
US6720710B1 (en) * | 1996-01-05 | 2004-04-13 | Berkeley Microinstruments, Inc. | Micropump |
US6812624B1 (en) | 1999-07-20 | 2004-11-02 | Sri International | Electroactive polymers |
US7320457B2 (en) | 1997-02-07 | 2008-01-22 | Sri International | Electroactive polymer devices for controlling fluid flow |
DE19834536C2 (de) * | 1998-07-31 | 2001-06-28 | Daimler Chrysler Ag | Vorrichtung, Mikrosystem und Verfahren zum Transportieren und/oder Entmischen von Flüssigkeiten |
DE19904106C2 (de) * | 1999-02-02 | 2001-06-28 | Oskar Bschorr | Schallgenerator mit Pumpantrieb |
US7537197B2 (en) | 1999-07-20 | 2009-05-26 | Sri International | Electroactive polymer devices for controlling fluid flow |
ATE381116T1 (de) | 1999-07-20 | 2007-12-15 | Stanford Res Inst Int | Elektroaktive polymergeneratoren |
ES2269470T3 (es) | 2000-09-14 | 2007-04-01 | Jan W. Beenker | Procedimiento y maquinaria para el transporte de medios. |
WO2002022358A1 (en) | 2000-09-18 | 2002-03-21 | Par Technologies, Llc. | Piezoelectric actuator and pump using same |
US7198250B2 (en) | 2000-09-18 | 2007-04-03 | Par Technologies, Llc | Piezoelectric actuator and pump using same |
US7268466B2 (en) | 2002-01-10 | 2007-09-11 | Steen Brabrand Rasmussen | Piezo electric pump and device with such pump |
AU2003225762A1 (en) | 2002-03-15 | 2003-09-29 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space | Electro-active device using radial electric field piezo-diaphragm for control of fluid movement |
WO2003081762A1 (en) | 2002-03-18 | 2003-10-02 | Sri International | Electroactive polymer devices for moving fluid |
KR100453815B1 (ko) * | 2002-05-20 | 2004-10-20 | 한국전자통신연구원 | 압전형 마이크로 펌프 |
DE10238600A1 (de) | 2002-08-22 | 2004-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Peristaltische Mikropumpe |
US7889877B2 (en) | 2003-06-30 | 2011-02-15 | Nxp B.V. | Device for generating a medium stream |
JP2007518910A (ja) * | 2003-06-30 | 2007-07-12 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 媒体流生成装置 |
US7287965B2 (en) | 2004-04-02 | 2007-10-30 | Adaptiv Energy Llc | Piezoelectric devices and methods and circuits for driving same |
US7312554B2 (en) | 2004-04-02 | 2007-12-25 | Adaptivenergy, Llc | Piezoelectric devices and methods and circuits for driving same |
US7290993B2 (en) | 2004-04-02 | 2007-11-06 | Adaptivenergy Llc | Piezoelectric devices and methods and circuits for driving same |
US7258533B2 (en) | 2004-12-30 | 2007-08-21 | Adaptivenergy, Llc | Method and apparatus for scavenging energy during pump operation |
US20060232166A1 (en) | 2005-04-13 | 2006-10-19 | Par Technologies Llc | Stacked piezoelectric diaphragm members |
US7345407B2 (en) | 2005-11-18 | 2008-03-18 | Adaptivenergy, Llc. | Human powered piezoelectric power generating device |
DE102005055697B4 (de) * | 2005-11-23 | 2011-12-29 | Allmendinger Elektromechanik Gmbh | Vorrichtung zur dosierten Abgabe eines Fluids und Gerät mit einer solchen Vorrichtung |
EP1862873A1 (de) | 2006-06-02 | 2007-12-05 | Montres Rado S.A. | Anzeigeeinrichtung für ein tragbares Gerät, wie eine Uhr |
EP2039934B1 (de) | 2006-07-11 | 2018-10-17 | Murata Manufacturing Co. Ltd. | Piezoelektrische pumpe |
KR20100053536A (ko) | 2007-06-29 | 2010-05-20 | 아트피셜 머슬, 인코퍼레이션 | 감각적 피드백을 부여하는 전기활성 고분자 변환기 |
EP2239793A1 (de) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung |
DE102009024757B4 (de) * | 2009-06-12 | 2012-01-19 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtungen zur Steuerung einer chemischen Reaktion mittels Druck unter Verwendung von hochdruck-optimierten Biokomponenten |
FR2950154B1 (fr) * | 2009-09-15 | 2011-12-23 | Commissariat Energie Atomique | Dispositif optique a membrane deformable a actionnement piezoelectrique en forme de couronne continue |
CA2828809A1 (en) | 2011-03-01 | 2012-09-07 | Francois EGRON | Automated manufacturing processes for producing deformable polymer devices and films |
JP2014517331A (ja) | 2011-03-22 | 2014-07-17 | バイエル・インテレクチュアル・プロパティ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 電場応答性高分子アクチュエータレンチキュラシステム |
EP2828901B1 (de) | 2012-03-21 | 2017-01-04 | Parker Hannifin Corporation | Rolle-an-rolle-herstellungsverfahren zur herstellung selbstheilender elektroaktiver polymervorrichtungen |
WO2013192143A1 (en) | 2012-06-18 | 2013-12-27 | Bayer Intellectual Property Gmbh | Stretch frame for stretching process |
US9590193B2 (en) | 2012-10-24 | 2017-03-07 | Parker-Hannifin Corporation | Polymer diode |
DE102013100559A1 (de) | 2013-01-21 | 2014-07-24 | Allmendinger Elektromechanik KG | Vorrichtung zur dosierten Abgabe eines Fluids, sowie Gerät und Verfahren mit einer solchen Vorrichtung |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1065880B (de) * | 1959-09-24 | |||
DE1165667B (de) * | 1962-06-28 | 1964-03-19 | Siemens Ag | Piezoelektrischer Biegeschwinger |
DE1287135B (de) * | 1967-06-16 | 1969-01-16 | Telefunken Patent | Elektroakustischer Wandler mit einer Schicht aus Halbleitermaterial bedeckten Membran |
DE3378966D1 (en) * | 1982-05-28 | 1989-02-23 | Xerox Corp | Pressure pulse droplet ejector and array |
DE3320441A1 (de) * | 1983-06-06 | 1984-12-06 | Siemens AG, 1000 Berlin und 8000 München | Mit fluessigkeitstroepfchen arbeitendes schreibgeraet mit an beiden enden starr mit einer duesenplatte verbundenen stabfoermigen piezoelektrischen wandlern |
DE3320443C2 (de) * | 1983-06-06 | 1994-08-18 | Siemens Ag | Flüssigkeitspumpe |
DE3342844A1 (de) * | 1983-11-26 | 1985-06-05 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Mikroplanarer tintenstrahldruckkopf |
-
1986
- 1986-05-30 DE DE19863618106 patent/DE3618106A1/de not_active Withdrawn
-
1987
- 1987-05-19 JP JP62503037A patent/JPH01500892A/ja active Pending
- 1987-05-19 WO PCT/DE1987/000230 patent/WO1987007218A1/de not_active Application Discontinuation
- 1987-05-19 EP EP87903244A patent/EP0310605A1/de not_active Withdrawn
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8308454B2 (en) | 2007-03-12 | 2012-11-13 | Murata Manufacturing Co., Ltd. | Fluid conveyance device |
CN105201796A (zh) * | 2015-10-29 | 2015-12-30 | 宁波大学 | 一种压电蠕动微泵 |
Also Published As
Publication number | Publication date |
---|---|
EP0310605A1 (de) | 1989-04-12 |
DE3618106A1 (de) | 1987-12-03 |
WO1987007218A1 (en) | 1987-12-03 |
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