JPH0145735B2 - - Google Patents

Info

Publication number
JPH0145735B2
JPH0145735B2 JP2906182A JP2906182A JPH0145735B2 JP H0145735 B2 JPH0145735 B2 JP H0145735B2 JP 2906182 A JP2906182 A JP 2906182A JP 2906182 A JP2906182 A JP 2906182A JP H0145735 B2 JPH0145735 B2 JP H0145735B2
Authority
JP
Japan
Prior art keywords
pattern
defects
defect inspection
mask
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2906182A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58147114A (ja
Inventor
Yasushi Uchama
Daikichi Awamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
REEZAA TETSUKU KK
Original Assignee
REEZAA TETSUKU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by REEZAA TETSUKU KK filed Critical REEZAA TETSUKU KK
Priority to JP57029061A priority Critical patent/JPS58147114A/ja
Publication of JPS58147114A publication Critical patent/JPS58147114A/ja
Publication of JPH0145735B2 publication Critical patent/JPH0145735B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
JP57029061A 1982-02-26 1982-02-26 パタ−ンの欠陥検査方法 Granted JPS58147114A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57029061A JPS58147114A (ja) 1982-02-26 1982-02-26 パタ−ンの欠陥検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57029061A JPS58147114A (ja) 1982-02-26 1982-02-26 パタ−ンの欠陥検査方法

Publications (2)

Publication Number Publication Date
JPS58147114A JPS58147114A (ja) 1983-09-01
JPH0145735B2 true JPH0145735B2 (fr) 1989-10-04

Family

ID=12265846

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57029061A Granted JPS58147114A (ja) 1982-02-26 1982-02-26 パタ−ンの欠陥検査方法

Country Status (1)

Country Link
JP (1) JPS58147114A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143704A (ja) * 1983-12-29 1985-07-30 Nippon Jido Seigyo Kk パタ−ンの欠陥検査方法
US4589141A (en) * 1984-03-12 1986-05-13 Texas Instruments Incorporated Apparatus for automatically inspecting printed labels
WO2006075687A1 (fr) 2005-01-14 2006-07-20 Fujitsu Limited Procede d'inspection de defauts de motif et procede de fabrication de dispositifs a semi-conducteur

Also Published As

Publication number Publication date
JPS58147114A (ja) 1983-09-01

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