JPH0143398Y2 - - Google Patents

Info

Publication number
JPH0143398Y2
JPH0143398Y2 JP10044185U JP10044185U JPH0143398Y2 JP H0143398 Y2 JPH0143398 Y2 JP H0143398Y2 JP 10044185 U JP10044185 U JP 10044185U JP 10044185 U JP10044185 U JP 10044185U JP H0143398 Y2 JPH0143398 Y2 JP H0143398Y2
Authority
JP
Japan
Prior art keywords
evaporation
metal
evaporated
vacuum
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10044185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6211172U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10044185U priority Critical patent/JPH0143398Y2/ja
Publication of JPS6211172U publication Critical patent/JPS6211172U/ja
Application granted granted Critical
Publication of JPH0143398Y2 publication Critical patent/JPH0143398Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10044185U 1985-07-03 1985-07-03 Expired JPH0143398Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10044185U JPH0143398Y2 (en, 2012) 1985-07-03 1985-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10044185U JPH0143398Y2 (en, 2012) 1985-07-03 1985-07-03

Publications (2)

Publication Number Publication Date
JPS6211172U JPS6211172U (en, 2012) 1987-01-23
JPH0143398Y2 true JPH0143398Y2 (en, 2012) 1989-12-15

Family

ID=30970266

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10044185U Expired JPH0143398Y2 (en, 2012) 1985-07-03 1985-07-03

Country Status (1)

Country Link
JP (1) JPH0143398Y2 (en, 2012)

Also Published As

Publication number Publication date
JPS6211172U (en, 2012) 1987-01-23

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