JPH0143352B2 - - Google Patents

Info

Publication number
JPH0143352B2
JPH0143352B2 JP57231956A JP23195682A JPH0143352B2 JP H0143352 B2 JPH0143352 B2 JP H0143352B2 JP 57231956 A JP57231956 A JP 57231956A JP 23195682 A JP23195682 A JP 23195682A JP H0143352 B2 JPH0143352 B2 JP H0143352B2
Authority
JP
Japan
Prior art keywords
center position
longest
image
rotation angle
ellipse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57231956A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59123981A (ja
Inventor
Hiromichi Iwase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57231956A priority Critical patent/JPS59123981A/ja
Publication of JPS59123981A publication Critical patent/JPS59123981A/ja
Publication of JPH0143352B2 publication Critical patent/JPH0143352B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Collating Specific Patterns (AREA)
  • Image Analysis (AREA)
JP57231956A 1982-12-29 1982-12-29 楕円画像の中心位置検出方式 Granted JPS59123981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57231956A JPS59123981A (ja) 1982-12-29 1982-12-29 楕円画像の中心位置検出方式

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57231956A JPS59123981A (ja) 1982-12-29 1982-12-29 楕円画像の中心位置検出方式

Publications (2)

Publication Number Publication Date
JPS59123981A JPS59123981A (ja) 1984-07-17
JPH0143352B2 true JPH0143352B2 (enExample) 1989-09-20

Family

ID=16931690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57231956A Granted JPS59123981A (ja) 1982-12-29 1982-12-29 楕円画像の中心位置検出方式

Country Status (1)

Country Link
JP (1) JPS59123981A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6397790B2 (ja) * 2015-03-31 2018-09-26 株式会社東京精密 ウェーハ位置決め検出装置、方法およびプログラム

Also Published As

Publication number Publication date
JPS59123981A (ja) 1984-07-17

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