JPH0141450Y2 - - Google Patents
Info
- Publication number
- JPH0141450Y2 JPH0141450Y2 JP17067087U JP17067087U JPH0141450Y2 JP H0141450 Y2 JPH0141450 Y2 JP H0141450Y2 JP 17067087 U JP17067087 U JP 17067087U JP 17067087 U JP17067087 U JP 17067087U JP H0141450 Y2 JPH0141450 Y2 JP H0141450Y2
- Authority
- JP
- Japan
- Prior art keywords
- organic solvent
- coolant
- gas recovery
- pipe
- recovery chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000003960 organic solvent Substances 0.000 claims description 46
- 239000002826 coolant Substances 0.000 claims description 26
- 238000011084 recovery Methods 0.000 claims description 26
- 238000004140 cleaning Methods 0.000 claims description 24
- 238000001816 cooling Methods 0.000 claims description 18
- 239000000110 cooling liquid Substances 0.000 claims description 7
- 230000001154 acute effect Effects 0.000 claims description 2
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000003915 air pollution Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000005068 transpiration Effects 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17067087U JPH0141450Y2 (enrdf_load_html_response) | 1987-11-10 | 1987-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17067087U JPH0141450Y2 (enrdf_load_html_response) | 1987-11-10 | 1987-11-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0177807U JPH0177807U (enrdf_load_html_response) | 1989-05-25 |
| JPH0141450Y2 true JPH0141450Y2 (enrdf_load_html_response) | 1989-12-07 |
Family
ID=31461815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17067087U Expired JPH0141450Y2 (enrdf_load_html_response) | 1987-11-10 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0141450Y2 (enrdf_load_html_response) |
-
1987
- 1987-11-10 JP JP17067087U patent/JPH0141450Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0177807U (enrdf_load_html_response) | 1989-05-25 |