JPH0139654B2 - - Google Patents

Info

Publication number
JPH0139654B2
JPH0139654B2 JP4074685A JP4074685A JPH0139654B2 JP H0139654 B2 JPH0139654 B2 JP H0139654B2 JP 4074685 A JP4074685 A JP 4074685A JP 4074685 A JP4074685 A JP 4074685A JP H0139654 B2 JPH0139654 B2 JP H0139654B2
Authority
JP
Japan
Prior art keywords
shaft
board
substrate
contact
box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4074685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61203385A (ja
Inventor
Akira Shiroai
Arinori Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP4074685A priority Critical patent/JPS61203385A/ja
Publication of JPS61203385A publication Critical patent/JPS61203385A/ja
Publication of JPH0139654B2 publication Critical patent/JPH0139654B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
JP4074685A 1985-02-28 1985-02-28 基板保持構造 Granted JPS61203385A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4074685A JPS61203385A (ja) 1985-02-28 1985-02-28 基板保持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4074685A JPS61203385A (ja) 1985-02-28 1985-02-28 基板保持構造

Publications (2)

Publication Number Publication Date
JPS61203385A JPS61203385A (ja) 1986-09-09
JPH0139654B2 true JPH0139654B2 (enEXAMPLES) 1989-08-22

Family

ID=12589195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4074685A Granted JPS61203385A (ja) 1985-02-28 1985-02-28 基板保持構造

Country Status (1)

Country Link
JP (1) JPS61203385A (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02306645A (ja) * 1989-05-22 1990-12-20 Hitachi Electron Eng Co Ltd 検査装置のウエハロード方法および運搬ケース載置台構造

Also Published As

Publication number Publication date
JPS61203385A (ja) 1986-09-09

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