JPH0139649B2 - - Google Patents

Info

Publication number
JPH0139649B2
JPH0139649B2 JP59069490A JP6949084A JPH0139649B2 JP H0139649 B2 JPH0139649 B2 JP H0139649B2 JP 59069490 A JP59069490 A JP 59069490A JP 6949084 A JP6949084 A JP 6949084A JP H0139649 B2 JPH0139649 B2 JP H0139649B2
Authority
JP
Japan
Prior art keywords
level
etching
period
signal
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59069490A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60213028A (ja
Inventor
Masatoshi Tahira
Kenji Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Cable Industries Ltd
Original Assignee
Mitsubishi Cable Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Cable Industries Ltd filed Critical Mitsubishi Cable Industries Ltd
Priority to JP59069490A priority Critical patent/JPS60213028A/ja
Publication of JPS60213028A publication Critical patent/JPS60213028A/ja
Publication of JPH0139649B2 publication Critical patent/JPH0139649B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP59069490A 1984-04-06 1984-04-06 終点検出方法 Granted JPS60213028A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59069490A JPS60213028A (ja) 1984-04-06 1984-04-06 終点検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59069490A JPS60213028A (ja) 1984-04-06 1984-04-06 終点検出方法

Publications (2)

Publication Number Publication Date
JPS60213028A JPS60213028A (ja) 1985-10-25
JPH0139649B2 true JPH0139649B2 (enExample) 1989-08-22

Family

ID=13404197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59069490A Granted JPS60213028A (ja) 1984-04-06 1984-04-06 終点検出方法

Country Status (1)

Country Link
JP (1) JPS60213028A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107919273A (zh) * 2017-11-20 2018-04-17 上海陛通半导体能源科技股份有限公司 一种刻蚀终点确定方法、晶圆刻蚀方法以及刻蚀系统

Also Published As

Publication number Publication date
JPS60213028A (ja) 1985-10-25

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