JPH0139375B2 - - Google Patents

Info

Publication number
JPH0139375B2
JPH0139375B2 JP25162283A JP25162283A JPH0139375B2 JP H0139375 B2 JPH0139375 B2 JP H0139375B2 JP 25162283 A JP25162283 A JP 25162283A JP 25162283 A JP25162283 A JP 25162283A JP H0139375 B2 JPH0139375 B2 JP H0139375B2
Authority
JP
Japan
Prior art keywords
box
shaped duct
push
duct
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP25162283A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60139567A (ja
Inventor
Takehide Hayashi
Hiroshi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daifuku Co Ltd
Original Assignee
Daifuku Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daifuku Co Ltd filed Critical Daifuku Co Ltd
Priority to JP25162283A priority Critical patent/JPS60139567A/ja
Publication of JPS60139567A publication Critical patent/JPS60139567A/ja
Publication of JPH0139375B2 publication Critical patent/JPH0139375B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP25162283A 1983-12-27 1983-12-27 クリ−ンル−ム内の荷搬送設備 Granted JPS60139567A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25162283A JPS60139567A (ja) 1983-12-27 1983-12-27 クリ−ンル−ム内の荷搬送設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25162283A JPS60139567A (ja) 1983-12-27 1983-12-27 クリ−ンル−ム内の荷搬送設備

Publications (2)

Publication Number Publication Date
JPS60139567A JPS60139567A (ja) 1985-07-24
JPH0139375B2 true JPH0139375B2 (cs) 1989-08-21

Family

ID=17225564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25162283A Granted JPS60139567A (ja) 1983-12-27 1983-12-27 クリ−ンル−ム内の荷搬送設備

Country Status (1)

Country Link
JP (1) JPS60139567A (cs)

Also Published As

Publication number Publication date
JPS60139567A (ja) 1985-07-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees