JPH0139210B2 - - Google Patents

Info

Publication number
JPH0139210B2
JPH0139210B2 JP57004265A JP426582A JPH0139210B2 JP H0139210 B2 JPH0139210 B2 JP H0139210B2 JP 57004265 A JP57004265 A JP 57004265A JP 426582 A JP426582 A JP 426582A JP H0139210 B2 JPH0139210 B2 JP H0139210B2
Authority
JP
Japan
Prior art keywords
etching
water
acid
bromine
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57004265A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58122734A (ja
Inventor
Tadashi Saito
Osamu Mikami
Hiroshi Nakagome
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP57004265A priority Critical patent/JPS58122734A/ja
Publication of JPS58122734A publication Critical patent/JPS58122734A/ja
Publication of JPH0139210B2 publication Critical patent/JPH0139210B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/60—Wet etching
    • H10P50/64—Wet etching of semiconductor materials
    • H10P50/642—Chemical etching
    • H10P50/646—Chemical etching of Group III-V materials

Landscapes

  • Weting (AREA)
JP57004265A 1982-01-14 1982-01-14 半導体装置の製法 Granted JPS58122734A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57004265A JPS58122734A (ja) 1982-01-14 1982-01-14 半導体装置の製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57004265A JPS58122734A (ja) 1982-01-14 1982-01-14 半導体装置の製法

Publications (2)

Publication Number Publication Date
JPS58122734A JPS58122734A (ja) 1983-07-21
JPH0139210B2 true JPH0139210B2 (https=) 1989-08-18

Family

ID=11579704

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57004265A Granted JPS58122734A (ja) 1982-01-14 1982-01-14 半導体装置の製法

Country Status (1)

Country Link
JP (1) JPS58122734A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4994546B2 (ja) * 2000-09-18 2012-08-08 株式会社デンソー 液冷式内燃機関の冷却装置

Also Published As

Publication number Publication date
JPS58122734A (ja) 1983-07-21

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