JPH0139042B2 - - Google Patents

Info

Publication number
JPH0139042B2
JPH0139042B2 JP2857883A JP2857883A JPH0139042B2 JP H0139042 B2 JPH0139042 B2 JP H0139042B2 JP 2857883 A JP2857883 A JP 2857883A JP 2857883 A JP2857883 A JP 2857883A JP H0139042 B2 JPH0139042 B2 JP H0139042B2
Authority
JP
Japan
Prior art keywords
measured
distance
reference surface
position sensor
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2857883A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59154314A (ja
Inventor
Atsushi Yoshikawa
Tsutomu Kamyama
Shinichi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP2857883A priority Critical patent/JPS59154314A/ja
Publication of JPS59154314A publication Critical patent/JPS59154314A/ja
Publication of JPH0139042B2 publication Critical patent/JPH0139042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2857883A 1983-02-24 1983-02-24 距離および傾斜角測定装置 Granted JPS59154314A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2857883A JPS59154314A (ja) 1983-02-24 1983-02-24 距離および傾斜角測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2857883A JPS59154314A (ja) 1983-02-24 1983-02-24 距離および傾斜角測定装置

Publications (2)

Publication Number Publication Date
JPS59154314A JPS59154314A (ja) 1984-09-03
JPH0139042B2 true JPH0139042B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-08-17

Family

ID=12252477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2857883A Granted JPS59154314A (ja) 1983-02-24 1983-02-24 距離および傾斜角測定装置

Country Status (1)

Country Link
JP (1) JPS59154314A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6126812A (ja) * 1984-07-17 1986-02-06 Rikagaku Kenkyusho 距離検知装置
JPS6283604A (ja) * 1985-10-09 1987-04-17 Yokogawa Electric Corp 変位変換器
JPS62116912A (ja) * 1985-11-18 1987-05-28 Canon Inc 自動焦点検知装置
JPS6432105A (en) * 1987-07-28 1989-02-02 Pioneer Electronic Corp Angle deviation measuring instrument for flat plate member
JP4696249B2 (ja) * 2007-02-13 2011-06-08 国立大学法人 新潟大学 形状測定方法及び装置
JP5487920B2 (ja) * 2009-12-03 2014-05-14 国立大学法人茨城大学 光学式３次元形状計測装置及び光学式３次元形状計測方法

Also Published As

Publication number Publication date
JPS59154314A (ja) 1984-09-03

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