JPH0138910Y2 - - Google Patents
Info
- Publication number
- JPH0138910Y2 JPH0138910Y2 JP396086U JP396086U JPH0138910Y2 JP H0138910 Y2 JPH0138910 Y2 JP H0138910Y2 JP 396086 U JP396086 U JP 396086U JP 396086 U JP396086 U JP 396086U JP H0138910 Y2 JPH0138910 Y2 JP H0138910Y2
- Authority
- JP
- Japan
- Prior art keywords
- flange
- molecular beam
- mounting rod
- shutter plate
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 description 9
- 230000008018 melting Effects 0.000 description 8
- 238000002844 melting Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 gallium arsenide (GaAs) compound Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP396086U JPH0138910Y2 (enrdf_load_stackoverflow) | 1986-01-17 | 1986-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP396086U JPH0138910Y2 (enrdf_load_stackoverflow) | 1986-01-17 | 1986-01-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62116540U JPS62116540U (enrdf_load_stackoverflow) | 1987-07-24 |
| JPH0138910Y2 true JPH0138910Y2 (enrdf_load_stackoverflow) | 1989-11-21 |
Family
ID=30784190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP396086U Expired JPH0138910Y2 (enrdf_load_stackoverflow) | 1986-01-17 | 1986-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0138910Y2 (enrdf_load_stackoverflow) |
-
1986
- 1986-01-17 JP JP396086U patent/JPH0138910Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62116540U (enrdf_load_stackoverflow) | 1987-07-24 |
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