JPH0137871Y2 - - Google Patents

Info

Publication number
JPH0137871Y2
JPH0137871Y2 JP1984144276U JP14427684U JPH0137871Y2 JP H0137871 Y2 JPH0137871 Y2 JP H0137871Y2 JP 1984144276 U JP1984144276 U JP 1984144276U JP 14427684 U JP14427684 U JP 14427684U JP H0137871 Y2 JPH0137871 Y2 JP H0137871Y2
Authority
JP
Japan
Prior art keywords
negative pressure
hole
holes
pressure hole
vacuum chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984144276U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161133U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984144276U priority Critical patent/JPH0137871Y2/ja
Publication of JPS6161133U publication Critical patent/JPS6161133U/ja
Application granted granted Critical
Publication of JPH0137871Y2 publication Critical patent/JPH0137871Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1984144276U 1984-09-26 1984-09-26 Expired JPH0137871Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984144276U JPH0137871Y2 (en, 2012) 1984-09-26 1984-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984144276U JPH0137871Y2 (en, 2012) 1984-09-26 1984-09-26

Publications (2)

Publication Number Publication Date
JPS6161133U JPS6161133U (en, 2012) 1986-04-24
JPH0137871Y2 true JPH0137871Y2 (en, 2012) 1989-11-14

Family

ID=30702561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984144276U Expired JPH0137871Y2 (en, 2012) 1984-09-26 1984-09-26

Country Status (1)

Country Link
JP (1) JPH0137871Y2 (en, 2012)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5915180B2 (ja) * 2011-03-16 2016-05-11 Tdk株式会社 シート吸着装置およびシート積層装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840337U (ja) * 1981-09-11 1983-03-16 日立精工株式会社 ウエハ研削盤における真空吸着装置
JPS59109140U (ja) * 1983-01-11 1984-07-23 株式会社デイスコ ウエ−ハバキユ−ムチヤツクテ−ブル

Also Published As

Publication number Publication date
JPS6161133U (en, 2012) 1986-04-24

Similar Documents

Publication Publication Date Title
US3652075A (en) Vacuum chuck and related apparatus and methods
CA2027681A1 (en) One-piece, open-end wrenching head with serrated jaws
CA2390009A1 (en) Flow cell for synthesis of arrays of dna probes and the like
JPH0137871Y2 (en, 2012)
WO1999059190A3 (en) Process and manufacturing tool architecture for use in the manufacture of one or more metallization levels on a workpiece
WO2000041221A3 (de) Verfahren und vorrichtung zur formgebung von halbleiteroberflächen
JP3071841U (ja) 深さ調整機能付きボックスレンチ
JPH1197514A (ja) ウエハー用表面処理装置におけるウエハー支持板の構造
JPH0230586U (en, 2012)
JP3063012U (ja) スパナ
JPH0644603Y2 (ja) 隙間用ナット保持装置
JPS6452650U (en, 2012)
JP2772632B2 (ja) 摺動装置
JPS6310006U (en, 2012)
JPS6134575U (ja) 吊上げ用クランプの回転カム取付構造
JPH0279027U (en, 2012)
JPS6310060U (en, 2012)
JPS628010U (en, 2012)
JPS61223316A (ja) ブラインドナツトの回り止め構造
JPH01137529U (en, 2012)
JPS6429824U (en, 2012)
JPH0284322U (en, 2012)
JPS6193991U (en, 2012)
CA2239492A1 (en) Multiple valve manifold for use with a pressure processing apparatus
JPS62162845U (en, 2012)