JPH0137871Y2 - - Google Patents
Info
- Publication number
- JPH0137871Y2 JPH0137871Y2 JP1984144276U JP14427684U JPH0137871Y2 JP H0137871 Y2 JPH0137871 Y2 JP H0137871Y2 JP 1984144276 U JP1984144276 U JP 1984144276U JP 14427684 U JP14427684 U JP 14427684U JP H0137871 Y2 JPH0137871 Y2 JP H0137871Y2
- Authority
- JP
- Japan
- Prior art keywords
- negative pressure
- hole
- holes
- pressure hole
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984144276U JPH0137871Y2 (US07494231-20090224-C00006.png) | 1984-09-26 | 1984-09-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984144276U JPH0137871Y2 (US07494231-20090224-C00006.png) | 1984-09-26 | 1984-09-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6161133U JPS6161133U (US07494231-20090224-C00006.png) | 1986-04-24 |
JPH0137871Y2 true JPH0137871Y2 (US07494231-20090224-C00006.png) | 1989-11-14 |
Family
ID=30702561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984144276U Expired JPH0137871Y2 (US07494231-20090224-C00006.png) | 1984-09-26 | 1984-09-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0137871Y2 (US07494231-20090224-C00006.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5915180B2 (ja) * | 2011-03-16 | 2016-05-11 | Tdk株式会社 | シート吸着装置およびシート積層装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5840337B2 (ja) * | 1976-03-31 | 1983-09-05 | 株式会社日立製作所 | 半導体集積回路の製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5840337U (ja) * | 1981-09-11 | 1983-03-16 | 日立精工株式会社 | ウエハ研削盤における真空吸着装置 |
JPS59109140U (ja) * | 1983-01-11 | 1984-07-23 | 株式会社デイスコ | ウエ−ハバキユ−ムチヤツクテ−ブル |
-
1984
- 1984-09-26 JP JP1984144276U patent/JPH0137871Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5840337B2 (ja) * | 1976-03-31 | 1983-09-05 | 株式会社日立製作所 | 半導体集積回路の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6161133U (US07494231-20090224-C00006.png) | 1986-04-24 |