JPH0134107Y2 - - Google Patents

Info

Publication number
JPH0134107Y2
JPH0134107Y2 JP1983093129U JP9312983U JPH0134107Y2 JP H0134107 Y2 JPH0134107 Y2 JP H0134107Y2 JP 1983093129 U JP1983093129 U JP 1983093129U JP 9312983 U JP9312983 U JP 9312983U JP H0134107 Y2 JPH0134107 Y2 JP H0134107Y2
Authority
JP
Japan
Prior art keywords
tubular member
anode
magnetic field
cathode
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983093129U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60534U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9312983U priority Critical patent/JPS60534U/ja
Publication of JPS60534U publication Critical patent/JPS60534U/ja
Application granted granted Critical
Publication of JPH0134107Y2 publication Critical patent/JPH0134107Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP9312983U 1983-06-17 1983-06-17 ペニング真空計 Granted JPS60534U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9312983U JPS60534U (ja) 1983-06-17 1983-06-17 ペニング真空計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9312983U JPS60534U (ja) 1983-06-17 1983-06-17 ペニング真空計

Publications (2)

Publication Number Publication Date
JPS60534U JPS60534U (ja) 1985-01-05
JPH0134107Y2 true JPH0134107Y2 (enrdf_load_html_response) 1989-10-17

Family

ID=30223766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9312983U Granted JPS60534U (ja) 1983-06-17 1983-06-17 ペニング真空計

Country Status (1)

Country Link
JP (1) JPS60534U (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003017433A (ja) * 2001-06-28 2003-01-17 Tokyo Electron Ltd チャンバセンサポート
JP5000386B2 (ja) * 2007-06-08 2012-08-15 株式会社アルバック 冷陰極電離真空計
JP4568321B2 (ja) * 2007-11-27 2010-10-27 有限会社真空実験室 冷陰極電離真空計

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233901U (enrdf_load_html_response) * 1975-08-29 1977-03-10

Also Published As

Publication number Publication date
JPS60534U (ja) 1985-01-05

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