JPH0132762Y2 - - Google Patents

Info

Publication number
JPH0132762Y2
JPH0132762Y2 JP1983039300U JP3930083U JPH0132762Y2 JP H0132762 Y2 JPH0132762 Y2 JP H0132762Y2 JP 1983039300 U JP1983039300 U JP 1983039300U JP 3930083 U JP3930083 U JP 3930083U JP H0132762 Y2 JPH0132762 Y2 JP H0132762Y2
Authority
JP
Japan
Prior art keywords
infrared
heater
furnace
heating
constant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983039300U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59145067U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3930083U priority Critical patent/JPS59145067U/ja
Publication of JPS59145067U publication Critical patent/JPS59145067U/ja
Application granted granted Critical
Publication of JPH0132762Y2 publication Critical patent/JPH0132762Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Control Of Resistance Heating (AREA)
  • Resistance Heating (AREA)
  • Tunnel Furnaces (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Furnace Details (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP3930083U 1983-03-18 1983-03-18 赤外線連続加熱炉 Granted JPS59145067U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3930083U JPS59145067U (ja) 1983-03-18 1983-03-18 赤外線連続加熱炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3930083U JPS59145067U (ja) 1983-03-18 1983-03-18 赤外線連続加熱炉

Publications (2)

Publication Number Publication Date
JPS59145067U JPS59145067U (ja) 1984-09-28
JPH0132762Y2 true JPH0132762Y2 (enrdf_load_stackoverflow) 1989-10-05

Family

ID=30169951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3930083U Granted JPS59145067U (ja) 1983-03-18 1983-03-18 赤外線連続加熱炉

Country Status (1)

Country Link
JP (1) JPS59145067U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013105959B4 (de) * 2013-06-07 2019-06-19 Heraeus Noblelight Gmbh Betriebsverfahren und Vorrichtung zur Bestrahlung eines Substrats
JP7178823B2 (ja) * 2018-08-17 2022-11-28 東京応化工業株式会社 基板加熱装置および基板処理システム
JP7236284B2 (ja) * 2019-02-12 2023-03-09 東京応化工業株式会社 基板加熱装置および基板処理システム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58197526A (ja) * 1982-05-13 1983-11-17 Toshiba Corp 温度制御装置

Also Published As

Publication number Publication date
JPS59145067U (ja) 1984-09-28

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