JPH01319957A - Integrated circuit - Google Patents
Integrated circuitInfo
- Publication number
- JPH01319957A JPH01319957A JP63154409A JP15440988A JPH01319957A JP H01319957 A JPH01319957 A JP H01319957A JP 63154409 A JP63154409 A JP 63154409A JP 15440988 A JP15440988 A JP 15440988A JP H01319957 A JPH01319957 A JP H01319957A
- Authority
- JP
- Japan
- Prior art keywords
- lead
- leads
- bumps
- fixing frame
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 abstract description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011889 copper foil Substances 0.000 abstract description 2
- 238000005530 etching Methods 0.000 abstract description 2
- 238000007747 plating Methods 0.000 abstract description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/50—Tape automated bonding [TAB] connectors, i.e. film carriers; Manufacturing methods related thereto
Landscapes
- Wire Bonding (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、集積回路に関し、特にテープ・オートメイテ
ッド・ボンディング方式で組立てられた集積回路装置に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to integrated circuits, and more particularly to integrated circuit devices assembled by tape automated bonding.
従来、集積回路の製造においては、組立の自動化を図っ
たT A B (Tape Automated Bo
nding)方式により全ピン同時にボンディング(い
わゆるギヤング・ボンディング)方式が多く採用されて
いる。Conventionally, in the production of integrated circuits, TAB (Tape Automated Bo) is used to automate assembly.
A method in which all pins are bonded simultaneously (so-called gigantic bonding) is often adopted.
第3図(a)、(b)は従来のTAB方式組立法を説明
するための平面図及びB−B’線断面図である。FIGS. 3(a) and 3(b) are a plan view and a sectional view taken along the line B-B' for explaining the conventional TAB assembly method.
L、SIチップ1にはバンプ2が形成されている。絶縁
フィルム3にはデバイスホール4があけられ、片持ち梁
形式でリード5が突出ている。絶縁フィルム3とLSI
チップ1とを位置合わせしてリード5をバンプ2とを溶
着する。L, SI chip 1 has bumps 2 formed thereon. A device hole 4 is formed in the insulating film 3, and a lead 5 protrudes in the form of a cantilever. Insulating film 3 and LSI
The chips 1 and the leads 5 are aligned and the bumps 2 are welded together.
上述した従来のTAB方式によるLSI装置では、バン
プ2と接続されるリード5の先端付近にリード固定枠が
なくリード5はデバイスホール4に突出した片持梁の構
造となっているの・で、多くのリード接続するためにリ
ードピッチを狭くすると、リード幅が狭くなりリード強
度が低下してしまう。その結果、ボンディング前工程に
おける応力に対してリードが変形(だれ及びピッチ間不
揃い)を起こしてしまうという欠点がある。さらに、ボ
ンディング以降の工程において、LSIチップ1とリー
ド5とがエツジタッチを起す欠点があり、多くのリード
を必要とするLSIチップでは実現困難である。In the conventional TAB type LSI device described above, there is no lead fixing frame near the tip of the lead 5 connected to the bump 2, and the lead 5 has a cantilever structure protruding into the device hole 4. If the lead pitch is narrowed in order to connect many leads, the lead width becomes narrow and the lead strength decreases. As a result, there is a drawback that the leads are deformed (sagging and pitch irregularities) due to stress in the pre-bonding process. Furthermore, there is a drawback that edge touching occurs between the LSI chip 1 and the leads 5 in the steps after bonding, which is difficult to realize in an LSI chip that requires many leads.
本発明の目的は、多くのリードがあってもリードの変形
なしにTAB方式の組立を行うことのできるgk8回路
を提供することにある。An object of the present invention is to provide a GK8 circuit that can be assembled using the TAB method without deforming the leads even if there are many leads.
本発明は、集積回路チップ表面の外周部に突出したバン
プと絶縁フィルムに設けられたリードをボンディング接
続する集積回路において、前記集積回路チップ表面のバ
ンプ外側のチップエツジを含むリード下面位置に固着さ
れたリード固定枠を含んで構成される。The present invention provides an integrated circuit in which bumps protruding from the outer periphery of the surface of an integrated circuit chip are bonded to leads provided on an insulating film, in which the bumps are fixed to the bottom surface of the leads including the chip edges outside the bumps on the surface of the integrated circuit chip. Consists of a lead fixing frame.
次に、本発明の実施例について図面を参照して説明する
。Next, embodiments of the present invention will be described with reference to the drawings.
第1図(a)、(b)は本発明の第1の実施例を示す平
面図及びA−A’線断面図である。FIGS. 1(a) and 1(b) are a plan view and a sectional view taken along the line AA', showing a first embodiment of the present invention.
LSIチップ1の表面の外周部にバンプ2が配置されて
いる。一方、絶縁フィルム3のデバイスホール4とリー
ド固定枠8とを前もって打ち抜き、その絶縁フィルム3
上に銅箔を密着させて、所定のリード5と配線パターン
6と試験用電極7とを周知のエツチングとめっき技術に
より形成する。その後、バンプ2とリード5とを1対1
に目合わせして両者をボンディングツールにより熱圧着
する。リード固定枠8は、バンプとチップエツジ間の位
置でリード下面に固着される。Bumps 2 are arranged on the outer periphery of the surface of the LSI chip 1. On the other hand, the device hole 4 and lead fixing frame 8 of the insulating film 3 are punched out in advance, and the insulating film 3 is
A copper foil is adhered thereon, and predetermined leads 5, wiring patterns 6, and test electrodes 7 are formed by well-known etching and plating techniques. After that, match bump 2 and lead 5 one to one.
Align the edges and heat and press the two together using a bonding tool. The lead fixing frame 8 is fixed to the lower surface of the lead at a position between the bump and the chip edge.
第2図は本発明の第2の実施例を示す平面図である。FIG. 2 is a plan view showing a second embodiment of the invention.
本実施例は、千鳥状に配列したバンプ2によるLSIチ
ップ1にて実現している。リード固定枠8は、LSIチ
ップのバンプ外側のチップエツジを含むリード下面に固
着されているので第1の実施例と同様の利点がある。This embodiment is realized by an LSI chip 1 having bumps 2 arranged in a staggered manner. Since the lead fixing frame 8 is fixed to the lower surface of the leads including the chip edges outside the bumps of the LSI chip, it has the same advantages as the first embodiment.
以上説明したように本発明は、LSIチップの内側のバ
ンプ近傍におけるリードの下面にリード固定枠を固着す
る事によって、第1にボンディング以前の作業工程にお
けるリードの変形(だれ及びピッチの不揃い)が防止で
き、結果的には、多ビン化が実現できる。第2にはバン
プとチップエツジ間でのエツジタッチが防止でき、信頼
性の高いLS’I装置が実現できるという効果を有する
。As explained above, the present invention fixes the lead fixing frame to the lower surface of the leads in the vicinity of the bumps inside the LSI chip, thereby preventing lead deformation (sloping and pitch irregularities) in the work process before bonding. This can be prevented, and as a result, multiple bins can be realized. Second, edge touching between bumps and chip edges can be prevented, and a highly reliable LS'I device can be realized.
第1図(a)、(b)は本発明の第1の実施例を説明す
るための平面図及びA−A’線断面図、第2図は本発明
の第2の実施例を説明するための平面図、第3図(a>
、(b)は従来のTAB方式組立法を説明するための平
面図及びB−B’線断面図である。
1・・・LSIチップ、2・・・バンプ、3・・・絶縁
フィルム、4・・・デバイスホール、5・・・リード、
6・・・配線パターン、7・・・試験用電極、8・・・
リード固定(b)
第 1 図
第 2 図FIGS. 1(a) and (b) are a plan view and a sectional view taken along the line A-A' for explaining the first embodiment of the present invention, and FIG. 2 is for explaining the second embodiment of the present invention. Plan view for Figure 3 (a>
, (b) are a plan view and a sectional view taken along the line BB' for explaining the conventional TAB assembly method. DESCRIPTION OF SYMBOLS 1... LSI chip, 2... Bump, 3... Insulating film, 4... Device hole, 5... Lead,
6... Wiring pattern, 7... Test electrode, 8...
Lead fixation (b) Fig. 1 Fig. 2
Claims (1)
Bリード接続バンプと絶縁フィルムに設けられた外部リ
ードを直接ボンディング接続して成る集積回路において
、前記集積回路チップの前記TABリード接続バンプ外
側のチップエッジを含むリード下面位置に固着されたリ
ード固定枠を含むことを特徴とする集積回路。Multiple TAs protruding from the outer periphery of the integrated circuit chip surface
In an integrated circuit in which a B lead connection bump and an external lead provided on an insulating film are directly bonded and connected, a lead fixing frame is fixed to a lower surface position of the lead including a chip edge outside the TAB lead connection bump of the integrated circuit chip. An integrated circuit comprising:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63154409A JPH01319957A (en) | 1988-06-21 | 1988-06-21 | Integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63154409A JPH01319957A (en) | 1988-06-21 | 1988-06-21 | Integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01319957A true JPH01319957A (en) | 1989-12-26 |
Family
ID=15583520
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63154409A Pending JPH01319957A (en) | 1988-06-21 | 1988-06-21 | Integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01319957A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04264743A (en) * | 1990-10-24 | 1992-09-21 | Internatl Business Mach Corp <Ibm> | Packaging |
EP0645806A1 (en) * | 1993-04-08 | 1995-03-29 | Seiko Epson Corporation | Semiconductor device |
-
1988
- 1988-06-21 JP JP63154409A patent/JPH01319957A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04264743A (en) * | 1990-10-24 | 1992-09-21 | Internatl Business Mach Corp <Ibm> | Packaging |
EP0645806A1 (en) * | 1993-04-08 | 1995-03-29 | Seiko Epson Corporation | Semiconductor device |
EP0645806A4 (en) * | 1993-04-08 | 1995-10-11 | Seiko Epson Corp | Semiconductor device. |
US5563445A (en) * | 1993-04-08 | 1996-10-08 | Seiko Epson Corporation | Semiconductor device |
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