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National Institute of Advanced Industrial Science and Technology AIST
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Agency of Industrial Science and Technology
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Publication date
Application filed by Agency of Industrial Science and TechnologyfiledCriticalAgency of Industrial Science and Technology
Priority to JP57191815ApriorityCriticalpatent/JPS5981851A/ja
Publication of JPS5981851ApublicationCriticalpatent/JPS5981851A/ja
Publication of JPH0131660B2publicationCriticalpatent/JPH0131660B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
System for providing a continuous motion sequential lateral solidification for reducing or eliminating artifacts in overlap regions, and a mask for facilitating such artifact reduction/elimination