JPH01311231A - Mass flowmeter - Google Patents
Mass flowmeterInfo
- Publication number
- JPH01311231A JPH01311231A JP63142264A JP14226488A JPH01311231A JP H01311231 A JPH01311231 A JP H01311231A JP 63142264 A JP63142264 A JP 63142264A JP 14226488 A JP14226488 A JP 14226488A JP H01311231 A JPH01311231 A JP H01311231A
- Authority
- JP
- Japan
- Prior art keywords
- conduit
- resistor
- resistance bodies
- fluid
- resistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 23
- 238000010438 heat treatment Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、流体が流れる導管に2つの抵抗体を互いに独
立して巻設したマスフローメータの改良に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a mass flow meter in which two resistors are independently wound around a conduit through which a fluid flows.
上記マスフローメータにおいては、流体が流れる導管に
2つの抵抗体を互いに独立して巻設し、これら両紙抗体
の温度を一定に保持するため、両紙抗体にそれぞれ電流
を供給し、そのときの両紙抗体に供給される電力の差に
基づいて、導管内を流れる流体の質量流量を検出するよ
うにしている。In the above mass flow meter, two resistors are independently wound around the conduit through which the fluid flows, and in order to keep the temperature of both paper antibodies constant, a current is supplied to each of the paper antibodies. The mass flow rate of fluid flowing through the conduit is determined based on the difference in power supplied to the conduit.
しかしながら、従来においては、前記抵抗体に流す電流
の方向が明確に規定されていなかったため、抵抗体間の
相互電磁誘導作用によりノイズレベルの高い出力信号、
つまり、S/N比がよくない出力信号しか得られなかっ
た。マスフローメータとして実用上問題がないレベルま
でノイズを低減するには、信号処理部にノイズフィルタ
を設ければよいが、このようにすると応答性が損なわれ
てしまい、高精度かつ高速応答性を有するマスフローメ
ータを得る上での大きな障害となっていた。However, in the past, since the direction of the current flowing through the resistor was not clearly defined, the output signal had a high noise level due to mutual electromagnetic induction between the resistors.
In other words, only an output signal with a poor S/N ratio was obtained. In order to reduce the noise to a level that does not pose a practical problem as a mass flow meter, it is possible to install a noise filter in the signal processing section, but this will impair the response, which would otherwise require high precision and high speed response. This was a major obstacle in obtaining a mass flow meter.
本発明は、上述の事柄に留意してなされたもので、その
目的とするところは、ノイズ影響がない出力信号を得る
ことができ、高速応答性を有するマスフローメータを提
供することにある。The present invention has been made with the above-mentioned considerations in mind, and an object of the present invention is to provide a mass flow meter that can obtain an output signal free from noise effects and has high-speed response.
上述の目的を達成するため、本発明に係るマスフローメ
ータは、流体が流れる導管に巻設された2つの抵抗体に
それぞれ生ずる磁界の向きが前記流体の流れる方向と逆
にな・るように、前記各抵抗体に電流を流すようにして
いる。In order to achieve the above-mentioned object, the mass flow meter according to the present invention is configured such that the direction of the magnetic field generated in each of the two resistors wound around the conduit through which the fluid flows is opposite to the direction in which the fluid flows. A current is caused to flow through each of the resistors.
上記構成によれば、流体が流れる導管に巻設された2つ
の抵抗体にそれぞれ生ずる磁界の向きが前記流体の方向
と逆になるように、前記各抵抗体に電流を流すようにし
ているので、ノイズフィルタを用いなくてもノイズの影
響がない出力信号を得ることができ、従って、高速応答
性をもって流量測定することができるので、上記目的は
完全に達成される。According to the above configuration, current is caused to flow through each of the resistors so that the direction of the magnetic field generated in each of the two resistors wound around the conduit through which the fluid flows is opposite to the direction of the fluid. , it is possible to obtain an output signal free from the influence of noise without using a noise filter, and therefore, the flow rate can be measured with high speed response, so that the above object is completely achieved.
以下、本発明の一実施例を、図面を参照しながら説明す
る。An embodiment of the present invention will be described below with reference to the drawings.
第1図は本発明に係るマスフa−メータの一構成例を示
し、同図において、1は流体Fが流れる導管で、矢印方
向に流体Fが流れる。FIG. 1 shows an example of the configuration of a mass meter according to the present invention. In the figure, reference numeral 1 denotes a conduit through which a fluid F flows, and the fluid F flows in the direction of the arrow.
2u、 2dは導管1の外周に適宜の間隔をおいて互い
に逆方向にしかも互いに独立した状態に巻設された抵抗
体としての2つの自己加熱形感熱コイル(以下、第[抵
抗体2u+ 第2抵抗体2dという)である、これら第
1抵抗体2u+第2抵抗体2dは、例えば鉄・ニッケル
合金等温度係数の大なる温度感応抵抗線よりなり、導管
1内を流れる流体Fの流量の僅かな変化をも検知するべ
く構成しである。2u and 2d are two self-heating thermosensitive coils (hereinafter referred to as resistors 2u and 2d) which are wound independently of each other at appropriate intervals on the outer periphery of the conduit 1 in opposite directions and independently from each other. The first resistor 2u and the second resistor 2d, which are referred to as a resistor 2d, are made of a temperature-sensitive resistance wire with a large temperature coefficient, such as an iron-nickel alloy, and are The sensor is configured to detect even such changes.
3.4は第1抵抗体2u、第2抵抗体2dをそれぞれ後
述するブリッジ回路8,14の構成要素として含む定温
度制御回、!(以下、第1定温度制御回路3、第2定温
度制御回路4という)で、これら第1定温度制御回路3
、第2定温度制御回路4は互いに同一の部品より構成さ
れており、第1抵抗体2uと第2抵抗体2dとの温度が
常に所定の温度で相等しくなるように制御するものであ
る。3.4 is a constant temperature control circuit including a first resistor 2u and a second resistor 2d as constituent elements of bridge circuits 8 and 14, which will be described later, respectively. (hereinafter referred to as the first constant temperature control circuit 3 and the second constant temperature control circuit 4), these first constant temperature control circuits 3
The second constant temperature control circuit 4 is composed of the same components, and controls so that the temperatures of the first resistor 2u and the second resistor 2d are always equal to each other at a predetermined temperature.
即ち、第1定温度制御回路3は第1抵抗体2uとこの第
1抵抗体2uの温度設定用抵抗5とブリッジ抵抗6.7
とからなるブリッジ回路8と、制御回路9とを備えてい
る。又、第2定温度制御回路4は第2抵抗体2dとこの
第2抵抗体2dの温度設定用抵抗10とブリッジ抵抗1
1.12と可変抵抗13とからなるブリッジ回路14と
、制御回路15とを備えている。尚、可変抵抗13は導
管1における流体Fの流量がゼロのとき、ブリッジ回路
8,14のそれぞれの出力が互いに等しくなるように調
整するものである。又、抵抗5. 6. 7.10.1
1.12.13は第1抵抗体2u、第2抵抗体2dに比
べて温度係数が十分小さくしである。That is, the first constant temperature control circuit 3 includes a first resistor 2u, a temperature setting resistor 5 of the first resistor 2u, and a bridge resistor 6.7.
A bridge circuit 8 and a control circuit 9 are provided. Further, the second constant temperature control circuit 4 includes a second resistor 2d, a temperature setting resistor 10 of the second resistor 2d, and a bridge resistor 1.
1.12 and a variable resistor 13, and a control circuit 15. The variable resistor 13 is used to adjust the outputs of the bridge circuits 8 and 14 to be equal to each other when the flow rate of the fluid F in the conduit 1 is zero. Also, resistance 5. 6. 7.10.1
1.12.13 has a sufficiently small temperature coefficient compared to the first resistor 2u and the second resistor 2d.
そして、上記第1抵抗体2u、第2抵抗体2dは、第1
定温度制御回路3、第2定温度制御回路4によってそれ
ぞれ供給される電流ru、r、が流れることによって第
1抵抗体2u、第2抵抗体2dにそれぞれ発生する磁界
Φ1.Φ4の向きが導管l内を流れる流体Fの向きと逆
になるように(第2図(A)参照)、前記第1定温度制
御回路3、第2定温度制御回路4にそれぞれ接続しであ
る。The first resistor 2u and the second resistor 2d are the first resistor 2u and the second resistor 2d.
Magnetic fields Φ1., which are generated in the first resistor 2u and the second resistor 2d, respectively, due to the flow of currents ru and r supplied by the constant temperature control circuit 3 and the second constant temperature control circuit 4, respectively. Connect them to the first constant temperature control circuit 3 and the second constant temperature control circuit 4, respectively, so that the direction of Φ4 is opposite to the direction of the fluid F flowing in the conduit l (see FIG. 2 (A)). be.
16、17はそれぞれ加算回路、減算回路であり、ブリ
ッジ回路8.14の出力点18.19にそれぞれ出力さ
れる電位P、、P、をそれぞれ入力とし、前者16から
は加算出力としてp、+pオが、又、後者17からは減
算出力としてPI−Ptがそれぞれ出力される。20は
除算回路であり、加算回路24及び減算回路からの出力
を入力とし、除算出力として(PI−Px )/(P+
+Pt )を出力する。そして、この出力(Pt −
Pg )/(P、+Pz )は、導管1内を流れる流体
Fの質量流量に比例しているので、これに適宜の定数を
乗することにより、導管1内を流れる流体Fの質量流量
を得ることができる。尚、21は出力端子である。16 and 17 are an addition circuit and a subtraction circuit, respectively, and the potentials P, , P outputted to the output points 18 and 19 of the bridge circuit 8 and 14 are respectively input, and the former 16 outputs p and +p as addition outputs. The latter 17 outputs PI-Pt as a subtracted output. 20 is a division circuit, which inputs the outputs from the addition circuit 24 and the subtraction circuit, and outputs (PI-Px)/(P+) as the division output.
+Pt) is output. And this output (Pt −
Pg )/(P, +Pz) is proportional to the mass flow rate of fluid F flowing in conduit 1, so by multiplying this by an appropriate constant, the mass flow rate of fluid F flowing in conduit 1 can be obtained. be able to. Note that 21 is an output terminal.
而して、上記構成のマスフローメータにおいては、導管
1に巻設された2つの抵抗体2u、 2dにそれぞれ生
ずる磁界Φ。、Φ4の向きが導管l内を流れる流体Fの
方向と逆になるように、抵抗体2u+2dに電流!、、
!、を流すようにしているので、第3図(A)に示すよ
うに、ノイズレベルが極めて低い出力信号Kを得ること
ができる。従って、従来のマスフローメータと異なり、
ノイズフィルタを用いなくても電圧変動が小さいノイズ
レベルが極めて低い出力を得ることができるので、高速
応答性をもって流量測定を行うことができる。In the mass flow meter having the above configuration, the magnetic field Φ is generated in each of the two resistors 2u and 2d wound around the conduit 1. , Φ4 is in the opposite direction to the direction of the fluid F flowing in the conduit l, so that the current flows through the resistor 2u+2d! ,,
! , it is possible to obtain an output signal K with an extremely low noise level, as shown in FIG. 3(A). Therefore, unlike conventional mass flow meters,
Even without using a noise filter, it is possible to obtain an output with small voltage fluctuations and an extremely low noise level, so flow rate measurement can be performed with high-speed response.
尚、ここで、第2図及び第3図について説明すると、第
2図(A) 〜(D)は2つの抵抗体2u、 2dに電
流!。、!4をそれぞれ供給する場合における電流の供
給方向と、電流!、、Iaによって各抵抗体2u、 2
dにそれぞれ生じる磁界Φ1.Φ4の向きと、導管l内
を流れる流体Fの方向とを示し、そのうち、(B)〜(
D)は比較例を示す、又、第3図(A)〜(D)は第2
図(A)〜(D)の各場合における出力信号の時間的変
化を示す波形図で、そのうち、(B)〜(D)は比較例
を示す、これらの図から、比較例においては、ノイズレ
ベルが極めて高いことが判る。Now, to explain about Figs. 2 and 3, Figs. 2 (A) to (D) show the current flowing through the two resistors 2u and 2d. . ,! 4, the current supply direction and the current! , , each resistor 2u, 2 by Ia
The magnetic fields Φ1.d and Φ1. The direction of Φ4 and the direction of the fluid F flowing inside the conduit l are shown, among which (B) to (
D) shows a comparative example, and FIGS. 3(A) to (D) show the second
Figures (A) to (D) are waveform diagrams showing temporal changes in the output signal in each case, of which (B) to (D) show comparative examples. From these diagrams, it can be seen that noise It can be seen that the level is extremely high.
本発明は、上述の実施例に限られるものではなく、例え
ば抵抗体2u、 2dを導管1に対して上記図示側以外
の方向に巻回してもよく、又、抵抗体2u。The present invention is not limited to the above-described embodiments, and, for example, the resistors 2u and 2d may be wound around the conduit 1 in a direction other than the illustrated side.
2dとして傍熱形怒熱コイルを用いてもよい。As 2d, an indirectly heated angry coil may be used.
以上説明したように、本発明に係るマスフローメータは
、流体が流れる導管に巻設された2つの抵抗体にそれぞ
れ生ずる磁界の向きが前記流体の流れる方向と逆になる
ように、前記各抵抗体に電流を流すようにしているので
、精度よく、しかも、高速応答性をもって流量測定する
ことができる。As explained above, in the mass flow meter according to the present invention, each of the resistors is arranged such that the direction of the magnetic field generated in each of the two resistors wound around the conduit through which the fluid flows is opposite to the direction in which the fluid flows. Since a current is passed through the flow rate, the flow rate can be measured with high accuracy and high-speed response.
第1図は本発明の一実施例に係るマスフローメータの構
成図である。
第2図(A)〜(D)は2つの抵抗体に電流をそれぞれ
供給する場合における電流の供給方向と、前記電流によ
って各抵抗体にそれぞれ生じる磁界の向きと、導管内を
流れる流体の方向とを示す説明図、第3図(A)〜(D
)は出力信号の時間的変化を示す波形図である。
1・・・導管、2u、 2d・・・抵抗体、F・・・流
体、■。。
■4・・・電流、Φ1.Φ4・・・磁界。
出 願 人 株式会社 エステツク化 理 人
弁理士 藷本英夫
(A)
(C)
2図
(B)
(D)
u Id
(A)
(C)
3図
(B)
(D)FIG. 1 is a configuration diagram of a mass flow meter according to an embodiment of the present invention. Figures 2 (A) to (D) show the direction of current supply when current is supplied to two resistors, the direction of the magnetic field generated in each resistor by the current, and the direction of fluid flowing in the conduit. An explanatory diagram showing the
) is a waveform diagram showing temporal changes in the output signal. 1... Conduit, 2u, 2d... Resistor, F... Fluid, ■. . ■4...Current, Φ1. Φ4...Magnetic field. Applicant: Rihito Aesthetics Co., Ltd.
Patent attorney Hideo Itomoto (A) (C) Figure 2 (B) (D) u Id (A) (C) Figure 3 (B) (D)
Claims (1)
したマスフローメータにおいて、前記2つの抵抗体にそ
れぞれ生ずる磁界の向きが前記流体の流れる方向と逆に
なるように、前記各抵抗体に電流を流すようにしたこと
を特徴とするマスフローメータ。In a mass flow meter in which two resistors are independently wound around a conduit through which a fluid flows, each of the resistors is arranged such that the direction of the magnetic field generated in each of the two resistors is opposite to the direction in which the fluid flows. A mass flow meter characterized by allowing current to flow through it.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63142264A JP2841199B2 (en) | 1988-06-09 | 1988-06-09 | Mass flow meter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63142264A JP2841199B2 (en) | 1988-06-09 | 1988-06-09 | Mass flow meter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01311231A true JPH01311231A (en) | 1989-12-15 |
JP2841199B2 JP2841199B2 (en) | 1998-12-24 |
Family
ID=15311299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63142264A Expired - Lifetime JP2841199B2 (en) | 1988-06-09 | 1988-06-09 | Mass flow meter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2841199B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61128123A (en) * | 1984-11-27 | 1986-06-16 | Esutetsuku:Kk | Mass flow meter |
-
1988
- 1988-06-09 JP JP63142264A patent/JP2841199B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61128123A (en) * | 1984-11-27 | 1986-06-16 | Esutetsuku:Kk | Mass flow meter |
Also Published As
Publication number | Publication date |
---|---|
JP2841199B2 (en) | 1998-12-24 |
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